JPS6138401B2 - - Google Patents
Info
- Publication number
- JPS6138401B2 JPS6138401B2 JP14650178A JP14650178A JPS6138401B2 JP S6138401 B2 JPS6138401 B2 JP S6138401B2 JP 14650178 A JP14650178 A JP 14650178A JP 14650178 A JP14650178 A JP 14650178A JP S6138401 B2 JPS6138401 B2 JP S6138401B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- grating
- optical system
- width
- interference fringes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000003384 imaging method Methods 0.000 claims description 13
- 230000003287 optical effect Effects 0.000 claims description 13
- 230000001427 coherent effect Effects 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000000903 blocking effect Effects 0.000 description 3
- 238000005286 illumination Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000012876 topography Methods 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14650178A JPS5572806A (en) | 1978-11-29 | 1978-11-29 | Contour display unit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14650178A JPS5572806A (en) | 1978-11-29 | 1978-11-29 | Contour display unit |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5572806A JPS5572806A (en) | 1980-06-02 |
| JPS6138401B2 true JPS6138401B2 (enrdf_load_html_response) | 1986-08-29 |
Family
ID=15409046
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14650178A Granted JPS5572806A (en) | 1978-11-29 | 1978-11-29 | Contour display unit |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5572806A (enrdf_load_html_response) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002090261A (ja) * | 2000-09-13 | 2002-03-27 | Hitachi Chem Co Ltd | モアレ縞の測定方法、フィルムの製造方法、およびモアレ縞の測定を行なうためのプログラムを格納する記録媒体 |
| JP2006058092A (ja) * | 2004-08-18 | 2006-03-02 | Fuji Xerox Co Ltd | ３次元形状測定装置および方法 |
| CA2923327C (en) * | 2013-09-10 | 2022-07-12 | Bae Systems Plc | Optical surface roughness measurement |
-
1978
- 1978-11-29 JP JP14650178A patent/JPS5572806A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5572806A (en) | 1980-06-02 |
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