JPH0473302B2 - - Google Patents

Info

Publication number
JPH0473302B2
JPH0473302B2 JP59007669A JP766984A JPH0473302B2 JP H0473302 B2 JPH0473302 B2 JP H0473302B2 JP 59007669 A JP59007669 A JP 59007669A JP 766984 A JP766984 A JP 766984A JP H0473302 B2 JPH0473302 B2 JP H0473302B2
Authority
JP
Japan
Prior art keywords
thin film
metal thin
semiconductor substrate
conductivity type
wiring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59007669A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60152070A (ja
Inventor
Teizo Takahama
Shunji Miura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Fuji Electric Corporate Research and Development Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd, Fuji Electric Corporate Research and Development Ltd filed Critical Fuji Electric Co Ltd
Priority to JP59007669A priority Critical patent/JPS60152070A/ja
Publication of JPS60152070A publication Critical patent/JPS60152070A/ja
Publication of JPH0473302B2 publication Critical patent/JPH0473302B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/50—Devices controlled by mechanical forces, e.g. pressure

Landscapes

  • Pressure Sensors (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
JP59007669A 1984-01-19 1984-01-19 圧覚センサ Granted JPS60152070A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59007669A JPS60152070A (ja) 1984-01-19 1984-01-19 圧覚センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59007669A JPS60152070A (ja) 1984-01-19 1984-01-19 圧覚センサ

Publications (2)

Publication Number Publication Date
JPS60152070A JPS60152070A (ja) 1985-08-10
JPH0473302B2 true JPH0473302B2 (cs) 1992-11-20

Family

ID=11672206

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59007669A Granted JPS60152070A (ja) 1984-01-19 1984-01-19 圧覚センサ

Country Status (1)

Country Link
JP (1) JPS60152070A (cs)

Also Published As

Publication number Publication date
JPS60152070A (ja) 1985-08-10

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