JPH0468576B2 - - Google Patents
Info
- Publication number
- JPH0468576B2 JPH0468576B2 JP16617887A JP16617887A JPH0468576B2 JP H0468576 B2 JPH0468576 B2 JP H0468576B2 JP 16617887 A JP16617887 A JP 16617887A JP 16617887 A JP16617887 A JP 16617887A JP H0468576 B2 JPH0468576 B2 JP H0468576B2
- Authority
- JP
- Japan
- Prior art keywords
- capsule
- pressure
- vibrating beam
- epitaxial layer
- silicon substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910052710 silicon Inorganic materials 0.000 claims description 37
- 239000010703 silicon Substances 0.000 claims description 37
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 36
- 239000002775 capsule Substances 0.000 claims description 25
- 238000000034 method Methods 0.000 claims description 18
- 239000013078 crystal Substances 0.000 claims description 11
- 238000005259 measurement Methods 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 claims description 6
- 239000000758 substrate Substances 0.000 description 22
- 238000001514 detection method Methods 0.000 description 11
- 238000005530 etching Methods 0.000 description 9
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 7
- 229910052796 boron Inorganic materials 0.000 description 7
- 230000005284 excitation Effects 0.000 description 6
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 150000002431 hydrogen Chemical class 0.000 description 4
- 229910052739 hydrogen Inorganic materials 0.000 description 4
- 239000001257 hydrogen Substances 0.000 description 4
- 230000010355 oscillation Effects 0.000 description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- 239000012670 alkaline solution Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- IXCSERBJSXMMFS-UHFFFAOYSA-N hcl hcl Chemical compound Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
- G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
- G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16617887A JPS6410141A (en) | 1987-07-02 | 1987-07-02 | Pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16617887A JPS6410141A (en) | 1987-07-02 | 1987-07-02 | Pressure sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6410141A JPS6410141A (en) | 1989-01-13 |
| JPH0468576B2 true JPH0468576B2 (fr) | 1992-11-02 |
Family
ID=15826524
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16617887A Granted JPS6410141A (en) | 1987-07-02 | 1987-07-02 | Pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6410141A (fr) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB9524624D0 (en) * | 1995-12-01 | 1996-01-31 | Weston Aerospace Ltd | Pressure sensor |
| JP4804798B2 (ja) * | 2005-05-27 | 2011-11-02 | 横河電機株式会社 | 圧力検出器及び圧力検出器の詰まり診断方法 |
| JP5656070B2 (ja) * | 2010-12-22 | 2015-01-21 | 横河電機株式会社 | 振動式絶対圧トランスデューサ |
| JP2012150029A (ja) * | 2011-01-20 | 2012-08-09 | Yokogawa Electric Corp | 振動式トランスデューサおよび振動式トランスデューサの製造方法 |
-
1987
- 1987-07-02 JP JP16617887A patent/JPS6410141A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6410141A (en) | 1989-01-13 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |