JPH0468385B2 - - Google Patents
Info
- Publication number
- JPH0468385B2 JPH0468385B2 JP60045899A JP4589985A JPH0468385B2 JP H0468385 B2 JPH0468385 B2 JP H0468385B2 JP 60045899 A JP60045899 A JP 60045899A JP 4589985 A JP4589985 A JP 4589985A JP H0468385 B2 JPH0468385 B2 JP H0468385B2
- Authority
- JP
- Japan
- Prior art keywords
- stainless steel
- treated
- article
- sputtering
- tin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000000034 method Methods 0.000 claims description 26
- 229910001220 stainless steel Inorganic materials 0.000 claims description 26
- 239000010935 stainless steel Substances 0.000 claims description 26
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 23
- 238000004544 sputter deposition Methods 0.000 claims description 18
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 16
- 238000010438 heat treatment Methods 0.000 claims description 14
- 238000000576 coating method Methods 0.000 claims description 13
- 238000005546 reactive sputtering Methods 0.000 claims description 12
- 238000005524 ceramic coating Methods 0.000 claims description 11
- 239000011248 coating agent Substances 0.000 claims description 11
- 229910052757 nitrogen Inorganic materials 0.000 claims description 10
- 238000004519 manufacturing process Methods 0.000 claims description 9
- 229910000963 austenitic stainless steel Inorganic materials 0.000 claims description 3
- 239000011247 coating layer Substances 0.000 claims description 3
- 229910000831 Steel Inorganic materials 0.000 description 9
- 239000010959 steel Substances 0.000 description 9
- 239000002184 metal Substances 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 8
- 238000000921 elemental analysis Methods 0.000 description 7
- 239000000463 material Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 150000004767 nitrides Chemical class 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 239000013077 target material Substances 0.000 description 4
- 229910052719 titanium Inorganic materials 0.000 description 4
- XKRFYHLGVUSROY-UHFFFAOYSA-N argon Substances [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 238000000992 sputter etching Methods 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 229910052758 niobium Inorganic materials 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- -1 argon ions Chemical class 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- 230000008570 general process Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 239000008204 material by function Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000002345 surface coating layer Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Landscapes
- Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4589985A JPS61204367A (ja) | 1985-03-08 | 1985-03-08 | ＴｉＮ被覆ステンレス鋼物品の製法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4589985A JPS61204367A (ja) | 1985-03-08 | 1985-03-08 | ＴｉＮ被覆ステンレス鋼物品の製法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61204367A JPS61204367A (ja) | 1986-09-10 |
| JPH0468385B2 true JPH0468385B2 (de) | 1992-11-02 |
Family
ID=12732088
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4589985A Granted JPS61204367A (ja) | 1985-03-08 | 1985-03-08 | ＴｉＮ被覆ステンレス鋼物品の製法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61204367A (de) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2762619B1 (fr) * | 1997-04-24 | 1999-07-02 | Univ Nantes | Procede de formation d'une couche d'un nitrure, en particulier d'un nitrure de bore, a la surface d'un substrat |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5613510A (en) * | 1979-07-16 | 1981-02-09 | Tdk Corp | Magnetic head and its manufacture |
-
1985
- 1985-03-08 JP JP4589985A patent/JPS61204367A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5613510A (en) * | 1979-07-16 | 1981-02-09 | Tdk Corp | Magnetic head and its manufacture |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61204367A (ja) | 1986-09-10 |
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