JPH0466376B2 - - Google Patents

Info

Publication number
JPH0466376B2
JPH0466376B2 JP60232698A JP23269885A JPH0466376B2 JP H0466376 B2 JPH0466376 B2 JP H0466376B2 JP 60232698 A JP60232698 A JP 60232698A JP 23269885 A JP23269885 A JP 23269885A JP H0466376 B2 JPH0466376 B2 JP H0466376B2
Authority
JP
Japan
Prior art keywords
rotating mirror
alignment
microscope
alignment marks
mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60232698A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6292318A (ja
Inventor
Choshin Sai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP60232698A priority Critical patent/JPS6292318A/ja
Publication of JPS6292318A publication Critical patent/JPS6292318A/ja
Publication of JPH0466376B2 publication Critical patent/JPH0466376B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP60232698A 1985-10-17 1985-10-17 目合せ装置 Granted JPS6292318A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60232698A JPS6292318A (ja) 1985-10-17 1985-10-17 目合せ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60232698A JPS6292318A (ja) 1985-10-17 1985-10-17 目合せ装置

Publications (2)

Publication Number Publication Date
JPS6292318A JPS6292318A (ja) 1987-04-27
JPH0466376B2 true JPH0466376B2 (enExample) 1992-10-23

Family

ID=16943368

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60232698A Granted JPS6292318A (ja) 1985-10-17 1985-10-17 目合せ装置

Country Status (1)

Country Link
JP (1) JPS6292318A (enExample)

Also Published As

Publication number Publication date
JPS6292318A (ja) 1987-04-27

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees