JPH046623A - Method and device for working magnetic disk - Google Patents

Abstract

PURPOSE:To subject the surface of a magnetic disk to uniform working with a high grade by detecting the distance up to the magnetic disk surface and maintaining the spacing distance of a polishing tape from a pressurized contact point therewith at a specified distance. CONSTITUTION:The pressurized contact point f of the polishing tape 27 with the surface of the magnetic disk 22 based on the plane perpendicular to the axis of rotation of the magnetic disk 22 and the distance up to the surface of the magnetic disk 22 at the point of the same distance to the center e of the axis of rotation of the magnetic disk 22 are detected to measure the surface wavy state of the magnetic disk 22. The spacing distance of a liquid injection nozzle 25 with the pressurized contact point f of the polishing tape 27 is maintained constant according to this surface wavy state. The leak rate of compressed air from the polishing tape 27 is, therefore, nearly constant and the pressing force of the compressed air to the polishing tape 27 is stabilized even if the disk 22 cause the surface waving. The specified deflection rate of the polishing tape 27 is thus obtd. The surface of the magnetic disk is worked uniformly over the entire surface in this way and the surface worked with the high grade is obtd.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a burnishing process for polishing the surface of a magnetic disk used as an external storage medium to smooth it and removing floating obstacles such as dust and minute protrusions. It relates to processing methods and devices such as.

BACKGROUND OF THE INVENTION Conventional burnishing processing for magnetic disks of this type involves fixing the magnetic disk to a rotating shaft and rotating it at high speed while applying an abrasive tape, as described in, for example, Japanese Unexamined Patent Publication No. 61-203259. The compressed air ejected from the fluid ejecting nozzle presses against the surface of the magnetic disk and polishes it.

FIG. 4 shows the basic structure of the conventional processing method. In FIG. 4, reference numeral 1 denotes a spindle serving as a rotating shaft, and a magnetic disk disk 2 is held by this spindle 1 by means such as a chuck and rotated at high speed. Reference numeral 3 denotes a drive arm serving as a moving means, and a pad 5 made of a flexible material is attached to the tip of the arm via a support member 4.

A slit-shaped nozzle 6 is formed in this pad 5 and widens toward the surface facing the magnetic disk disk 2, and this nozzle 6 is connected to a compressed air source 7 through a support member 4. A polishing tape 8 is fed out from a feed reel 9, placed on the pad 5, and wound onto a take-up reel 10.

Note that 11 and 12 are guide rows.

In FIG. 4, when the magnetic disk disk 2 is rotated at high speed by the spindle 1 and compressed air is jetted from the compressed air source 7 through the slit-shaped nozzle 6 of the pad 5, the abrasive particles wound between the reels 9 and 10 are A portion of the tape 8 corresponding to the nozzle 6 is pressed by air pressure and is bent, and this portion is linearly pressed against the surface of the magnetic disk disk 2. Then, the drive arm 3 moves the pad 5 and the polishing tape 8 sliding on the pad 5 in the radial direction over the magnetic disk disk 2, polishing the entire surface of the magnetic disk disk 2 and removing floating obstacles. .

Problems to be Solved by the Invention In such a magnetic disk processing method, since the holding portion 1a of the spindle 1 for the magnetic disk disk 2 is small due to its structure, the magnetic disk disk 2 does not rotate as shown in FIG. In many cases, the surface runs out at an angle with respect to the axial center e. However, in conventional devices of this kind, pad 5. Support member 4. The drive arm 3 has no means for actively compensating for the movement of the magnetic disk disk 2 due to surface runout, and compensation for this depends only on the flexibility of the polishing tape 8, that is, the amount of deflection. For this reason, as the distance between the pad 5 and the surface of the magnetic disk disc 2 increases, the leakage of compressed air at both ends of the polishing tape 8 increases rapidly, making it impossible to obtain a constant pressing force against the polishing tape 8. First, the machined surface of the magnetic disk disk 2 lacks uniformity. Such a phenomenon becomes more pronounced as the distance from the rotation axis center e increases.

Furthermore, even if the holding portion 1a of the spindle 1 could be made larger, the state of pressure contact of the polishing tape 8 with the magnetic disk disk 2 made of thin aluminum or the like would be a line contact when compressed air is blown out from the slit-shaped nozzle 6. This results in instability due to surface contact or surface contact, making it impossible to achieve high-quality machining.

The present invention solves such conventional problems, and provides a magnetic disk processing method and apparatus that can uniformly process the entire surface of a magnetic disk and achieve a high-quality processed surface. With the goal.

Means for Solving the Problems In order to achieve the above object, the present invention includes a detecting means for detecting the distance to the magnetic disk surface, and a detecting means for holding the detecting means on a plane perpendicular to the rotation axis of the magnetic disk. means for transferring and positioning the abrasive tape at an arbitrary point at the same distance from the center of rotation of the magnetic disk as the pressure contact point of the abrasive tape against the surface of the magnetic disk, and according to distance information to the surface of the magnetic disk obtained by the detection means. and means for moving and positioning the fluid ejecting nozzle so that the distance from the pressure contact point of the polishing tape is constant.

Furthermore, a structure may be adopted in which a porous nozzle having a large number of pores is used as the fluid ejection nozzle.

Effects The present invention has the following effects due to the above-described configuration. That is, when the processed surface of the magnetic disk is wobbling relative to the rotation axis, the distance between the fluid jet nozzle and the pressure contact point of the abrasive tape is maintained constant based on the distance information from the disk surface obtained by the detection means. As a result, the amount of fluid ejected from the fluid jet nozzle leaking from both ends of the polishing tape can be kept almost constant, and the pressure of the fluid against the polishing tape can be stabilized to achieve uniform polishing on the magnetic disk surface. can.

Furthermore, by configuring the fluid ejecting nozzle with a porous nozzle with many pores, it is possible to press the polishing tape uniformly over a wide surface, and the polishing tape comes into pressure contact with the magnetic disk surface over a wider contact area. can do. Therefore, stable processing conditions can be achieved and the quality of the magnetic disk can be improved.

Embodiment FIG. 1 shows the basic configuration of an embodiment of the present invention. In the 111th ffl, 21 is a spindle;
A magnetic disk disk 22 is held on this spindle 21 by means such as a chuck and rotated at high speed. Reference numeral 23 denotes a drive arm, which has a fluid ejection nozzle 25 attached to its tip via a support member 24, and includes means for moving the fluid ejection nozzle 25 in the direction of arrow C corresponding to the radial direction of the magnetic disk disk 22, and further described below. means for moving and positioning the spindle 21 in the direction of arrow Z corresponding to the axial direction of the spindle 21 according to the distance information from the gap detector 32. The fluid ejection nozzle 25 is a porous nozzle having a large number of pores made of, for example, a sintered material, and is entirely ventilated, and is connected to the compressed air source 26 through the support member 24.
It is connected to the. A polishing tape 27 is fed out from a feeding reel 28, stretched between guide rollers 29 and 30, covered along the support member 24 at the tip of the drive arm 23 and the fluid ejection nozzle 25, and placed on the take-up reel 31. By winding it up, it comes into sliding contact with the fluid ejecting nozzle 25. A gap detector 32 serves as a detection means, and is placed on the magnetic disk disk 22 at a constant reference distance h2, and detects the distance to the surface of the magnetic disk disk 22. 33 is the second gap detector 32
a moving arm 3 serving as means for moving and positioning the magnetic disk in the direction of arrow d corresponding to the radial direction of the magnetic disk disk 22;
Reference numeral 4 denotes a holding member for the gap detector 32, and the gap detector 32 is held at the center pressure contact point of the polishing tape 27 with respect to the surface of the magnetic disk disc 22 with reference to a plane perpendicular to the rotation axis center e of the spindle 21. f and spindle 21
The object is transferred and positioned on an arbitrary point g at the same distance r from the rotation axis center e. In the case of this embodiment, the phase difference between the center press contact point f and the detection point g is set in advance to 180°, and the gap detector 32 The reference distance to the surface of the magnetic disk disc 22, that is, the reference distance to the detection point g, is set as h2, and the reference separation distance from the center pressure contact point f of the abrasive tape 27 of the fluid jet nozzle 25 is set as hl. .

Next, the operation of the embodiment will be explained with reference to FIGS. 2 and 3. Note that during the operation of each part, the magnetic disk disk 22 is deflected, and in FIG. 2, the polishing tape 27
Fig. 3 shows a state in which the center pressure contact point f with respect to the magnetic disk disk 22 is lowered by a distance h8 from the standard separation distance h1 from the fluid ejection nozzle 25. This shows a state where the distance h4 is higher than the standard separation distance h1. The surface runout of the magnetic disk disk 22 repeats such a state.

In the embodiment described above, the magnetic disk disk 22 is rotated at high speed by the spindle 21, and the drive arm 23 moves on the magnetic disk disk 22 in the direction of the arrow c1. At the same time, compressed air is sent from the compressed air source 26 and ejected through the porous fluid ejecting nozzle 25, and due to the pressure of this air pressure, the abrasive tape 27 wound between the reels 28 and 31 is moved onto the magnetic disk disc. 22 surface is pressed against the surface and polished. Furthermore, in parallel with these operations, following the movement of the center press contact point f of the polishing tape 27 by the drive arm 23, the gap detector 32 or the drive arm 33 moves the center press contact point f with respect to the rotation axis center e. It is transported and positioned in the direction of arrow d1 so as to be located at distance point g.

Here, when the surface runout of the magnetic disk disk 220 is as shown in FIG. In contrast, the distance detected by the gap detector 32 at the detection point g becomes shorter by h8 than the reference distance h2 described above. This is detected by the gap detector 32,
Based on this detection information, after correcting the 180° phase difference, the drive arm 23 supporting the fluid ejection nozzle 25 descends in the Z1 direction by a distance 1a. As a result, the reference separation distance 111 of the fluid ejection nozzle 25 from the surface of the magnetic disk disk 22 is maintained constant.

Further, in a state where the second surface runout is as shown in FIG. Conversely, the detected distance at the distance detection point g is longer than the reference distance h2 by h4. This is similarly detected by the gap detector 32, and based on this detection information, after correcting the 180° phase difference, the drive arm 23 that supports the fluid ejection nozzle 25
rises in the Z2 direction by a distance h4. As a result, the reference separation distance h1 of the fluid ejection nozzle 25 from the surface of the magnetic disk disk 22 is maintained constant.

As described above, according to this embodiment, the polishing tape 27
The surface of the magnetic disk disk 22 is detected by detecting the distance to the surface of the magnetic disk disk 22 at a point that is the same distance from the pressure contact point f on the surface of the magnetic disk disk 22 and the rotation axis center e of the magnetic disk disk 22. The run-out condition is measured, and the distance between the fluid jet nozzle 25 and the pressure contact point f of the polishing tape 27 is maintained constant according to the state of the surface run-out, so even if the disk disk 22 is run-out, , polishing tape 2
Since the amount of compressed air leaking from the polishing tape 7 is almost constant, the pressing force of the compressed air against the polishing tape 27 can be stabilized.
The amount of deflection of the polishing tape 27 can be made constant. Therefore, uniform and high-quality burnishing can be achieved over the entire surface of the magnetic disk disk 22. Furthermore, in this embodiment, by using the fluid ejection nozzle 25 as a porous nozzle made of sintered material, pressure can be uniformly applied to the polishing tape 27 over a wide plane, and the contact surface with the surface of the magnetic disk disc 22 is As the size increases, the machining tact also improves, and the surface of the disk disk 22 can be machined with a higher quality.

In this embodiment, the phase difference between the pressure contact point f and the detection point g is set to 180 degrees, but even if there is another phase difference, means for correcting the phase difference and controlling the positioning of the jet nozzle 25 is provided. By providing this, the phase difference can be made arbitrary.

Moreover, although the fluid ejection nozzle 25 is illustrated as a porous nozzle, similar effects can be obtained by using a slit-shaped nozzle as shown in the conventional example.

Effects of the Invention As is clear from the above embodiments, the present invention is based on a plane perpendicular to the rotational axis of the magnetic disk, and the pressure contact point of the abrasive tape with respect to the surface of the magnetic disk disk and the rotation center of the magnetic disk. The distance to the magnetic disk surface is detected at the same distance point, and the distance between the fluid jet nozzle and the pressure contact point of the abrasive tape is maintained constant according to this detection, so that stable pressure of the fluid on the abrasive tape is achieved. As a result, stable burnishing can be performed on the magnetic disk surface, and uniform, high-quality processing can be achieved.

In addition, by using a porous nozzle for the fluid jet nozzle, it is possible to press the abrasive tape against the magnetic disk surface uniformly over a wide area, increasing processing efficiency and processing the magnetic disk surface with even higher quality. can.

[Brief explanation of the drawing]

FIG. 1 is a cross-sectional view showing the basic configuration of a magnetic disk processing method and apparatus in an embodiment of the present invention, and FIGS. 2 and 3 show a state in which a magnetic disk is processed using the same method and apparatus, respectively. 4 is a sectional view showing the basic configuration of a conventional magnetic disk processing method, and FIG.
The figure is a sectional view showing problems in the same method. 21... Spindle, 22... Magnetic disk disc,
23... Drive arm, 24... Support member, 25...
- Fluid ejection nozzle, 26... Compressed air source, 27...
Polishing tape, 32... Gap detector, 33... Drive arm, e... Rotation shaft center, f... Center pressure contact,
9... Distance detection point. Name of agent: Patent attorney Masahiro Kura Go 4 Figure 5

Claims (3)

[Claims] (1) In a method for processing a magnetic disk, the magnetic disk is fixed to a rotating shaft and rotated at high speed, and a polishing tape is pressed and pressed against the surface of the magnetic disk using fluid ejected from a fluid ejecting nozzle to polish the magnetic disk. Using a plane perpendicular to the rotation axis of the disk as a reference, measure the distance to the magnetic disk surface at any point that is the same distance from the rotation center of the magnetic disk as the pressure contact point of the abrasive tape with the magnetic disk surface. A method for processing a magnetic disk, characterized in that the distance between the fluid ejecting nozzle and the pressure contact point of the polishing tape is maintained constant according to the detected distance. (2) A magnetic disk processing device that polishes the magnetic disk by pressing a polishing tape against the surface of the magnetic disk using fluid ejected from a fluid ejecting nozzle while the magnetic disk is fixed to a rotating shaft and rotated at high speed. a detection means for detecting a distance from the surface; and a press contact of the abrasive tape against the surface of the magnetic disk with respect to the rotation center of the magnetic disk on a plane perpendicular to the rotation axis of the magnetic disk while holding the detection means. a means for moving and positioning the fluid ejecting nozzle to a point at the same distance as the point, and a constant distance between the fluid ejecting nozzle and the pressure contact point of the polishing tape according to distance information to the magnetic disk surface obtained by the detecting means. 1. A magnetic disk processing device characterized by comprising means for moving and positioning the magnetic disk so that (3) The magnetic disk processing apparatus according to claim (2), wherein the fluid ejecting nozzle is a porous nozzle having a large number of pores.