JPS58160053A - Polishing device - Google Patents

Polishing device

Info

Publication number
JPS58160053A
JPS58160053A JP4498782A JP4498782A JPS58160053A JP S58160053 A JPS58160053 A JP S58160053A JP 4498782 A JP4498782 A JP 4498782A JP 4498782 A JP4498782 A JP 4498782A JP S58160053 A JPS58160053 A JP S58160053A
Authority
JP
Japan
Prior art keywords
magnetic disk
magnetic disc
air bearing
polished
polishing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4498782A
Other languages
Japanese (ja)
Inventor
Yoshio Enoki
榎 芳雄
Takao Aoyama
青山 隆夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP4498782A priority Critical patent/JPS58160053A/en
Publication of JPS58160053A publication Critical patent/JPS58160053A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B21/00Machines or devices using grinding or polishing belts; Accessories therefor
    • B24B21/04Machines or devices using grinding or polishing belts; Accessories therefor for grinding plane surfaces

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

PURPOSE:To enable to obtain an excellent finished surface with fine surface roughness and scarce directional property for grinding by a method wherein the contact pressure of an abrasive tape applied to a magnetic disc is supported by an air bearing in the magnetic disc surface polishing device. CONSTITUTION:A magnetic disc 1 to be polished is fixed on the upper surface of a rotary shaft part 2 by means of a fixing jig 3 and shifted between a feed and a take-up reels 5 and 6 and polished its surface in such a way that the abrasive tape 4 running along a pad roller 8 covered by an elastic body such as felt or the like is brought into lightly contact with the surface of the rotating magnetic disc 1. The air bearing compressing a moving part 9 and a fixed part 10 with a large number of small hole groups 11 is arranged just beneath said contact part in order to support the magnetic disc 1 by the moving part 9, which is kept under favorably lubricated state due to the air jetted out of the small hole groups 11. In such a manner as mentioned above, the surface to be polished is prevented from being applied by excess force, resulting in enabling to obtain the excellent finished surface with fine surface roughness and scarce directional property due to grinding.

Description

【発明の詳細な説明】 本発明は磁気ディスクの表面を研磨する研磨装置に関す
るものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a polishing device for polishing the surface of a magnetic disk.

磁気ディスクとしては、例えば厚さ75μm程度ノポリ
エステルフィルムの表裏に磁性塗料を塗布して厚さ1〜
3μm程度の磁性層を形成したものがある。このような
フレキシブルな磁気ディスクは、その電磁変換特性を安
定するために、その表面にある微細な突起を除去して平
滑にする必要があり、磁気ディスクを回転せしめた状態
で研磨テープを押しあてる方法が一般的であった。
As a magnetic disk, for example, a polyester film with a thickness of about 75 μm is coated with magnetic paint on the front and back sides, and a thickness of 1~
There is one in which a magnetic layer of about 3 μm is formed. In order to stabilize the electromagnetic characteristics of such flexible magnetic disks, it is necessary to remove minute protrusions from the surface of the disk to make it smooth.This is done by pressing an abrasive tape against the surface of the disk while it is rotating. The method was common.

その一方法として、磁気ディスクを円板状のターンテー
ブルに固定し、研磨する方法、また他の方法として回転
せしめた磁気ディスクを表裏から研磨テープおよびフェ
ルトなど適当な材質の摺接体ではさんで研磨する方法な
どがある。
One method is to fix the magnetic disk to a disk-shaped turntable and polish it, and another method is to sandwich the rotating magnetic disk from the front and back between abrasive tape, felt, or other suitable sliding contact materials. There are methods of polishing.

しかし、これらの方法は研磨テープを磁気ディスク表面
に押しあてる圧力の調整が非常に難しく、圧力不足の場
合には研磨不十分となり、逆に圧力過大の場合には深い
研磨傷がつくという問題があった。またターンテーブル
や摺接体の材質や状態によっても表面の研磨の仕上り状
態が左右されるばかりでなく、その選択が不適当である
と裏面に形成されている磁性層を損傷するという問題が
あった一 本発明は、このような問題点を解消した磁気ディスクの
研磨装置を提供するもので、回転する磁気ディスクにか
かる研磨テープの圧力を空気軸受を用い、その円筒状可
動部で支えるようにしたことを特徴とするものである。
However, with these methods, it is very difficult to adjust the pressure with which the polishing tape is pressed against the magnetic disk surface, and if the pressure is insufficient, the polishing will be insufficient, and if the pressure is too high, deep polishing scratches will occur. there were. In addition, the finish of surface polishing is not only affected by the material and condition of the turntable and sliding contact, but also if the selection is inappropriate, there is the problem of damaging the magnetic layer formed on the back surface. In addition, the present invention provides a magnetic disk polishing device that solves these problems, and uses an air bearing to support the pressure of the polishing tape applied to the rotating magnetic disk by its cylindrical movable part. It is characterized by the fact that

空気軸受は可動部と固定部との摩擦が極めて小さいため
微小な力により回転し、かつ高速回転にも追随が可能で
あり、しかも焼付が起る心配がない。また、加えられる
圧力によって若干の偏位をする余地があるので、過大な
圧力を吸収するなどの特長をもっている。フレキシブル
磁気ディスクは回転時においても外力により容易に変形
するが、空気軸受の円筒状可動部は磁気ディスクに接触
するときわずかな摩擦力により、その回転によく追随す
るので、磁気ディスクの表面に設けられた薄い磁性膜を
損傷することなしに研磨テープの圧力を支えることがで
きる。またフレキシブル磁気ディスクの場合には回転時
において完全に平坦な状態を保つことは困難であり、こ
のため、磁気ディスクを支える物体が磁気ディスク面の
変動に追随できないと、研磨テープの接触圧が一時的に
過大になり、深い研磨傷をつける原因となっていた。
Since the friction between the movable part and the fixed part is extremely small, air bearings rotate with a minute force, can follow high-speed rotation, and are free from seizure. In addition, since there is room for slight deviation depending on the applied pressure, it has the feature of absorbing excessive pressure. Flexible magnetic disks are easily deformed by external forces even when rotating, but when the cylindrical movable part of the air bearing comes into contact with the magnetic disk, it follows the rotation well due to the slight frictional force, so it is necessary to install it on the surface of the magnetic disk. It can support the pressure of the polishing tape without damaging the thin magnetic film. Furthermore, in the case of flexible magnetic disks, it is difficult to maintain a completely flat state during rotation, and for this reason, if the object supporting the magnetic disk cannot follow the fluctuations of the magnetic disk surface, the contact pressure of the abrasive tape will temporarily decrease. This caused the polishing to become excessively large, causing deep polishing scratches.

この場合、空気軸受を用いるとその可動部が圧力変動に
よく追随して偏位する余地があるため、このような問題
はなく、良好な研磨状態を保つことが出来る。なお空気
軸受の特性は固定部と可動部との間隙長および空気噴出
孔の位置と数、空気圧などによって大幅に変えることが
出来るので。
In this case, if an air bearing is used, there is room for the movable part to follow pressure fluctuations and deviate, so there is no such problem and a good polishing state can be maintained. Note that the characteristics of air bearings can be changed significantly depending on the gap length between the fixed part and the movable part, the position and number of air jet holes, the air pressure, etc.

その場合に応じて最適条件を選ぶことが可能である。It is possible to select optimal conditions depending on the case.

次に、本発明の一実施例を図面を参照して詳細に説明す
る。第1図(a) 、 (b)は本発明の研磨装置の概
略構成を示す正面図と側面図であり、図において、1は
研磨すべき磁気ディスクであって、回転可能な軸部2の
上面に固定治具3により固定され回転するようになって
いる。4は研磨テープであり、巻出し9巻取りリール6
,6により徐々に移動する、また了はガイドロールであ
る。8は表面をフェルト等の弾性体で被覆したパッドロ
ーラーであり、垂直方向に移動させることが出来、ノ<
ラドローラー表面に沿わせた研磨テープ4を磁気ディス
ク1の表面に軽く接触させて表面研磨を行なう。9はこ
の接触部分を磁気ディスク1の裏側から支えるだめに設
けられた空気軸受の円筒状可動部であり、固定部10の
まわりに回転しうる。なお、空気軸受が設けられる位置
は磁気ディスク1と研磨テープ4の接触部の真下で、そ
の軸方向を磁気ディスクの直径方向と平行にし、円筒状
可動部が磁気ディスク1の裏面に接触するように配設さ
れている。
Next, one embodiment of the present invention will be described in detail with reference to the drawings. FIGS. 1(a) and 1(b) are a front view and a side view showing a schematic configuration of a polishing apparatus of the present invention. In the figures, 1 is a magnetic disk to be polished, and a rotatable shaft portion 2 is It is fixed to the upper surface by a fixing jig 3 and is configured to rotate. 4 is a polishing tape, unwinding 9 winding reel 6
, 6 gradually moves, and Ryo is a guide roll. 8 is a pad roller whose surface is covered with an elastic material such as felt, and can be moved in the vertical direction.
The surface of the magnetic disk 1 is polished by bringing the polishing tape 4 along the surface of the rad roller into light contact with the surface of the magnetic disk 1. Reference numeral 9 denotes a cylindrical movable part of an air bearing provided in a receptacle that supports this contact part from the back side of the magnetic disk 1, and can rotate around the fixed part 10. The air bearing is located directly below the contact area between the magnetic disk 1 and the polishing tape 4, with its axial direction parallel to the diameter direction of the magnetic disk, and the cylindrical movable portion is placed in contact with the back surface of the magnetic disk 1. It is located in

第2図は空気軸受の可動部9と固定部10の構造を示す
断面図であり、多数の小孔群11より噴出された空気が
両部分間の狭い間隙を通過する際に示す粘性により、極
めて良好な潤滑が保たれるものである。
FIG. 2 is a cross-sectional view showing the structure of the movable part 9 and the fixed part 10 of the air bearing. Extremely good lubrication is maintained.

なお、空気軸受の可動部は軽いプラスチックなどの材質
が適当であるが、摩擦電気による帯電のだめ、研磨によ
り発生した微粉末が表面に付着する場合には、導電性カ
ーボンブラックが配合されて帯電性が除かれたプラスチ
ックを用いることが推奨される。
The movable parts of air bearings are suitably made of a light material such as plastic, but if charging due to frictional electricity is insufficient or if fine powder generated by polishing adheres to the surface, conductive carbon black may be added to prevent charging. It is recommended to use plastics that have been removed.

次に、このような構成を有する本発明の研磨装置により
得られる効果を、従来のように磁気ディスクをターンテ
ーブルに固定して研磨する方法と比較して次表に示す。
Next, the effects obtained by the polishing apparatus of the present invention having such a configuration are shown in the following table in comparison with a conventional method of polishing a magnetic disk by fixing it to a turntable.

いずれの場合も平均粒径3μのホワイトアランダム砥粒
を用いた−11:4ooo研磨テープを1 mm7秒の
速さで送りながら、3インチフロッピーディスクを1o
oo回転/秒で回転させた状態で表面研磨を行なったも
のであり、表面粗さを中心線平均粗さであられしたもの
である。
In both cases, a 3-inch floppy disk was polished at 1o while feeding a -11:4ooo abrasive tape made of white alundum abrasive grains with an average particle size of 3μ at a speed of 1 mm and 7 seconds.
The surface was polished while rotating at oo rotations/second, and the surface roughness was calculated by the centerline average roughness.

(J−1,下 惰9) 上記表より明らかなように、本発明においては円周方向
、直径方向とも良好な研磨状態が得られたが、従来例で
は研磨方向に沿って明かな研磨傷が見られ、このため特
に直径方向の表面粗さが大きくなっていることがわかる
(J-1, Lower 9) As is clear from the table above, in the present invention, good polishing conditions were obtained in both the circumferential and diametrical directions, but in the conventional example, there were obvious polishing scratches along the polishing direction. It can be seen that the surface roughness is particularly large in the diametrical direction.

本発明はまた磁気ディスクの表裏両面を同時に研磨する
場合にも適用でき、第1図の研磨機構を2組使用し、表
裏異った位置においてこれらを同時に操作すればよい。
The present invention can also be applied to polishing both the front and back sides of a magnetic disk at the same time, by using two sets of polishing mechanisms shown in FIG. 1 and operating them simultaneously at different positions on the front and back sides.

なお、研磨すべき磁気ディスクの半径が研磨テープの幅
よりも大なる場合には、磁気ディスクの半径方向に研磨
テープおよびパッドロールを移動させる機構を設ければ
よい。また、本発明において研磨テープを徐々に移動さ
せるのはテープ目詰りによる悪影響を避けるためである
が、研磨が目詰りが起らぬ程度の短時間に終了する場合
には断続的なテープ送りであっても支障ない。また、研
磨テープを磁気ディスクに押しあてる方法も、第1図の
ようなパッドローラーを用いるものに限定されるもので
はなく、他の方法においても同様に本発明を適用するこ
とができる。
Note that if the radius of the magnetic disk to be polished is larger than the width of the polishing tape, a mechanism for moving the polishing tape and pad roll in the radial direction of the magnetic disk may be provided. Furthermore, in the present invention, the polishing tape is moved gradually in order to avoid the adverse effects of tape clogging, but if polishing is to be completed in a short period of time without clogging, intermittent tape feeding may be used. There is no problem even if there is. Further, the method of pressing the abrasive tape against the magnetic disk is not limited to the method using a pad roller as shown in FIG. 1, and the present invention can be similarly applied to other methods.

以上の説明から明らかなように、本発明にかかる研磨装
置は空気軸受を用いて磁気ディスクにかかる研磨テープ
の接触圧を支えるようにしたものであり、研磨すべき表
面に過大な力がかかるのを抑え、表面粗さが小さく、研
磨の方向性が少ない良好な仕上りの磁気ディスクを製造
することが可能となるだめ、その産業上の価値は大なる
ものがある。
As is clear from the above description, the polishing device according to the present invention uses an air bearing to support the contact pressure of the polishing tape applied to the magnetic disk, and prevents excessive force from being applied to the surface to be polished. It is of great industrial value because it makes it possible to manufacture magnetic disks with a good finish, with less surface roughness, and less directional polishing.

【図面の簡単な説明】[Brief explanation of drawings]

第1図(a) 、 (b)は本発明にかかる研磨装置の
概略構成を示す正面図および側面図、第2図は本発明に
用いる空気軸受部の一例の断面図である。 1・・・・・・磁気ディスク、2・・・・・・軸部、3
・川・・固定治具、4・・・・・・研磨テープ、6・・
・・・・巻出しリール、6・・・・・・巻取りリール、
7・・・・・・ガイドロール、8・・・・・・パッドロ
ーラー、9・・・・・・円筒状可動部、10・・・・・
・固定部。 代理人の氏名 弁理士 中 尾 敏 男 ほか1名第1
図 第2図
FIGS. 1(a) and 1(b) are a front view and a side view showing a schematic configuration of a polishing apparatus according to the present invention, and FIG. 2 is a sectional view of an example of an air bearing part used in the present invention. 1...Magnetic disk, 2...Shaft part, 3
・River: Fixing jig, 4: Polishing tape, 6:
... Unwinding reel, 6... Winding reel,
7...Guide roll, 8...Pad roller, 9...Cylindrical movable part, 10...
·Fixed part. Name of agent: Patent attorney Toshio Nakao and 1 other person No. 1
Figure 2

Claims (2)

【特許請求の範囲】[Claims] (1)磁気ディスクを保持し得る回転可能な軸部と、こ
の軸部上に保持された磁気ディスクの一方の主面側に配
設された表面を弾性体で被覆したノくラドローラーと、
このパッドローラーに接し、かつ移動可能に配設された
研磨テープと、前記磁気ディスクの他方の主面側で、前
記パッドローラーと対向する位置に配設された円筒状の
可動部を有する空気軸受を備え、前記空気軸受の円筒状
可動部をその回転軸が前記磁気ディスクの直径方向と平
行になるように配置し、前記パッドローラーと前記空気
軸受によって前記磁気ディスクを挟むことにより、前記
研磨テープを前記軸部により回転せられる前記磁気ディ
スクに接触させて前記磁気ディスクの表面を研磨するよ
うに構成したことを特徴とする研磨装置。
(1) A rotatable shaft portion capable of holding a magnetic disk, and a nokurado roller whose surface is coated with an elastic material, which is disposed on one main surface side of the magnetic disk held on the shaft portion;
An air bearing having an abrasive tape movably disposed in contact with the pad roller, and a cylindrical movable portion disposed on the other main surface side of the magnetic disk at a position facing the pad roller. , the cylindrical movable part of the air bearing is arranged so that its rotation axis is parallel to the diametrical direction of the magnetic disk, and the magnetic disk is sandwiched between the pad roller and the air bearing, so that the abrasive tape is removed. A polishing device characterized in that the polishing device is configured to polish the surface of the magnetic disk by bringing it into contact with the magnetic disk rotated by the shaft portion.
(2)空気軸受の円筒状可動部を帯電性を防止したプラ
スチックで形成したことを特徴とする特許請求の範囲第
(1)項記載の研磨装置。
(2) The polishing device according to claim (1), wherein the cylindrical movable part of the air bearing is made of antistatic plastic.
JP4498782A 1982-03-19 1982-03-19 Polishing device Pending JPS58160053A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4498782A JPS58160053A (en) 1982-03-19 1982-03-19 Polishing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4498782A JPS58160053A (en) 1982-03-19 1982-03-19 Polishing device

Publications (1)

Publication Number Publication Date
JPS58160053A true JPS58160053A (en) 1983-09-22

Family

ID=12706801

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4498782A Pending JPS58160053A (en) 1982-03-19 1982-03-19 Polishing device

Country Status (1)

Country Link
JP (1) JPS58160053A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61146465A (en) * 1984-12-21 1986-07-04 Y A Shii Kk Floppy disk grinding attachment

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61146465A (en) * 1984-12-21 1986-07-04 Y A Shii Kk Floppy disk grinding attachment

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