JPH0465992U - - Google Patents
Info
- Publication number
- JPH0465992U JPH0465992U JP10682890U JP10682890U JPH0465992U JP H0465992 U JPH0465992 U JP H0465992U JP 10682890 U JP10682890 U JP 10682890U JP 10682890 U JP10682890 U JP 10682890U JP H0465992 U JPH0465992 U JP H0465992U
- Authority
- JP
- Japan
- Prior art keywords
- gas bearing
- compression stage
- high frequency
- blade
- frequency motor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000006835 compression Effects 0.000 claims description 17
- 238000007906 compression Methods 0.000 claims description 17
- 239000002131 composite material Substances 0.000 claims description 3
- 239000000919 ceramic Substances 0.000 claims 2
- 238000001816 cooling Methods 0.000 claims 2
- 230000002706 hydrostatic effect Effects 0.000 claims 1
- 125000006850 spacer group Chemical group 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10682890U JPH0465992U (US08124317-20120228-C00026.png) | 1990-10-15 | 1990-10-15 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10682890U JPH0465992U (US08124317-20120228-C00026.png) | 1990-10-15 | 1990-10-15 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0465992U true JPH0465992U (US08124317-20120228-C00026.png) | 1992-06-09 |
Family
ID=31853073
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10682890U Pending JPH0465992U (US08124317-20120228-C00026.png) | 1990-10-15 | 1990-10-15 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0465992U (US08124317-20120228-C00026.png) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001271786A (ja) * | 2000-03-02 | 2001-10-05 | Pfeiffer Vacuum Gmbh | ターボ分子ポンプ |
US20100104428A1 (en) * | 2006-09-22 | 2010-04-29 | Martin Ernst Tollner | Molecular drag pumping mechanism |
JP2010138741A (ja) * | 2008-12-10 | 2010-06-24 | Edwards Kk | 真空ポンプ |
JP2011074903A (ja) * | 2009-10-02 | 2011-04-14 | Shimadzu Corp | ターボ分子ポンプ |
WO2016121573A1 (ja) * | 2015-01-30 | 2016-08-04 | エドワーズ株式会社 | 真空ポンプ |
WO2023213458A1 (fr) * | 2022-05-05 | 2023-11-09 | Pfeiffer Vacuum | Pompe à vide turbomoléculaire et procédé d'assemblage |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60204997A (ja) * | 1984-03-28 | 1985-10-16 | Osaka Shinku Kiki Seisakusho:Kk | 複合真空ポンプ |
JPS61283794A (ja) * | 1985-06-10 | 1986-12-13 | Nippon Soken Inc | タ−ボ分子ポンプ |
JPS6410473U (US08124317-20120228-C00026.png) * | 1987-07-10 | 1989-01-19 | ||
JPH01167495A (ja) * | 1987-12-23 | 1989-07-03 | Hitachi Ltd | 真空ポンプ |
-
1990
- 1990-10-15 JP JP10682890U patent/JPH0465992U/ja active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60204997A (ja) * | 1984-03-28 | 1985-10-16 | Osaka Shinku Kiki Seisakusho:Kk | 複合真空ポンプ |
JPS61283794A (ja) * | 1985-06-10 | 1986-12-13 | Nippon Soken Inc | タ−ボ分子ポンプ |
JPS6410473U (US08124317-20120228-C00026.png) * | 1987-07-10 | 1989-01-19 | ||
JPH01167495A (ja) * | 1987-12-23 | 1989-07-03 | Hitachi Ltd | 真空ポンプ |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001271786A (ja) * | 2000-03-02 | 2001-10-05 | Pfeiffer Vacuum Gmbh | ターボ分子ポンプ |
US20100104428A1 (en) * | 2006-09-22 | 2010-04-29 | Martin Ernst Tollner | Molecular drag pumping mechanism |
JP2010138741A (ja) * | 2008-12-10 | 2010-06-24 | Edwards Kk | 真空ポンプ |
JP2011074903A (ja) * | 2009-10-02 | 2011-04-14 | Shimadzu Corp | ターボ分子ポンプ |
WO2016121573A1 (ja) * | 2015-01-30 | 2016-08-04 | エドワーズ株式会社 | 真空ポンプ |
JP2016142156A (ja) * | 2015-01-30 | 2016-08-08 | エドワーズ株式会社 | 真空ポンプ |
WO2023213458A1 (fr) * | 2022-05-05 | 2023-11-09 | Pfeiffer Vacuum | Pompe à vide turbomoléculaire et procédé d'assemblage |
FR3135306A1 (fr) * | 2022-05-05 | 2023-11-10 | Pfeiffer Vacuum | Pompe à vide turbomoléculaire et procédé d’assemblage |