JPH046592U - - Google Patents
Info
- Publication number
- JPH046592U JPH046592U JP4247490U JP4247490U JPH046592U JP H046592 U JPH046592 U JP H046592U JP 4247490 U JP4247490 U JP 4247490U JP 4247490 U JP4247490 U JP 4247490U JP H046592 U JPH046592 U JP H046592U
- Authority
- JP
- Japan
- Prior art keywords
- rotor
- casing
- rotating shaft
- molecular pump
- turbo
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4247490U JPH046592U (tr) | 1990-04-23 | 1990-04-23 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4247490U JPH046592U (tr) | 1990-04-23 | 1990-04-23 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH046592U true JPH046592U (tr) | 1992-01-21 |
Family
ID=31554053
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4247490U Pending JPH046592U (tr) | 1990-04-23 | 1990-04-23 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH046592U (tr) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5270409A (en) * | 1975-12-06 | 1977-06-11 | Pfeiffer Vakuumtechnik | Turbomolecular pumps |
JPS61215495A (ja) * | 1985-03-22 | 1986-09-25 | Mitsubishi Heavy Ind Ltd | タ−ボ分子ポンプ |
JPS62135743A (ja) * | 1985-12-10 | 1987-06-18 | Mitsubishi Heavy Ind Ltd | バランシング方法 |
-
1990
- 1990-04-23 JP JP4247490U patent/JPH046592U/ja active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5270409A (en) * | 1975-12-06 | 1977-06-11 | Pfeiffer Vakuumtechnik | Turbomolecular pumps |
JPS61215495A (ja) * | 1985-03-22 | 1986-09-25 | Mitsubishi Heavy Ind Ltd | タ−ボ分子ポンプ |
JPS62135743A (ja) * | 1985-12-10 | 1987-06-18 | Mitsubishi Heavy Ind Ltd | バランシング方法 |
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