JPH04655U - - Google Patents

Info

Publication number
JPH04655U
JPH04655U JP4192490U JP4192490U JPH04655U JP H04655 U JPH04655 U JP H04655U JP 4192490 U JP4192490 U JP 4192490U JP 4192490 U JP4192490 U JP 4192490U JP H04655 U JPH04655 U JP H04655U
Authority
JP
Japan
Prior art keywords
sample mounting
mounting electrode
plasma
sample
reaction chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4192490U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4192490U priority Critical patent/JPH04655U/ja
Publication of JPH04655U publication Critical patent/JPH04655U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP4192490U 1990-04-19 1990-04-19 Pending JPH04655U (it)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4192490U JPH04655U (it) 1990-04-19 1990-04-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4192490U JPH04655U (it) 1990-04-19 1990-04-19

Publications (1)

Publication Number Publication Date
JPH04655U true JPH04655U (it) 1992-01-07

Family

ID=31553011

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4192490U Pending JPH04655U (it) 1990-04-19 1990-04-19

Country Status (1)

Country Link
JP (1) JPH04655U (it)

Similar Documents

Publication Publication Date Title
JPS561344A (en) Controlling method for optimum wet-quantity in wet-type insulator stain measurement
NO921821L (no) Metode og apparat for aa redusere utstraaling av elektriskefelt fra katodestraaleroer
JPH0469465U (it)
GB2012971A (en) Apparatus and method for testing gas-tightness of hollow bodies
JPS55118637A (en) Plasma etching apparatus
JPS63147815U (it)
JPS6455375A (en) Device for projecting ion beam
JPS51140636A (en) Cleaning device of electrically charged particle-attaching member
JPS61188352U (it)
JPH0368330B2 (it)
SU1233092A1 (ru) Устройство дл дефектоскопии поверхности изделий
JPH047658U (it)
JPS5639451A (en) Method for determining deterioration of coating film
JPH0178027U (it)
JPS6163832U (it)
JPH0481054U (it)
JPS635631U (it)
JPS6424828U (it)
JPH0311055U (it)
JPS56127773A (en) Etching device
JPS577935A (en) Method for dry etching
JPH01165444U (it)
JPS6437465U (it)
JPS5554464A (en) Voltage variation detecting method
JPS5554447A (en) Surface electrometer on negative feedback alternating- current type