JPH0462909A - Fixation of magnet in structure for generating magnetic field - Google Patents

Abstract

PURPOSE:To enable a magnetron in precise magnetic field distribution to be manufactured by a method wherein projection and recession are provided in a permanent magnet and a magnetic yoke to be engaged with each other for facilitating the connecting fixation of both elements. CONSTITUTION:A projection 9 is provided on the outside surface of an outside magnetic pole 3 while a recession 10 to be engaged with the projection 9 is provided on the inside of an auxiliary permanent magnet 6. In order to connection-fix the auxiliary permanent magnet 6 to the outside magnetic pole 3 e.g. firstly the recession 10 of the lower side auxiliary permanent magnet 6 is engaged with the projection 9 of the outside magnetic pole 3 to be fixed to each other and then the upper side auxiliary permanent magnet 6 is likewise fixed. At this time, the upper and lower auxiliary permanent magnets 6, 6 having the same magnetic susceptibility in the same direction repulse with each other but they may be easily assembled when they are connection-fixed by said process. Furthermore, when a yoke 4 (mild magnetic body) 4 is connection-fixed to a permanent magnet 8, a magnetic flux loops the loop at the local part of the projection provided on the outside surface of the yoke 4 and the recession of the permanent magnet 8 to give suction to the yoke 4 and the permanent magnet so that repulsion force of mutual magnets may be decreased further to facilitate the assembly work.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method for solidifying a magnet in a structure for generating a magnetic field, and more specifically, for example, a structure for generating a magnetic field such as a magnetron for a sputtering device. This invention relates to a method for solidifying a magnet to facilitate its assembly and to produce a more precise magnetic field distribution.

[Conventional technology]

FIG. 4 shows a conventional magnetron for a sputtering device, and FIG. 5 shows a target material installed in the magnetron shown in FIG. 4.

In the figure, (1) is a target material made of non-magnetic or ferromagnetic material, and on the back side, an inner magnetic pole (2) and an outer magnetic pole (3) with the opposite polarity are arranged to surround it. Their lower parts are usually connected by a magnetic yaw (4) made of a soft magnetic material such as soft rope.

Each of the above parts is housed in a vacuum container, and during use, the upper surface of the target material (1) is placed in a low-pressure Ar atmosphere, and a voltage is applied between the target (1) and a non-sputtered object (not shown) such as a disk. is applied, the Ar gas is ionized by electrons ejected from the surface of the target material (1),
By colliding with the target material (1), the Ar ions knock out the material of the target (1) and form a thin film on the surface of the non-sputtered material.

And the leakage magnetic field formed by both magnetic poles (2) and (3) is
Efficiently captures electrons ejected from the target (1) surface, promotes ionization of Ar gas, and increases sputtering efficiency.

When assembling the above magnetron, if the magnet is made of ferrite and has a small energy product, the repulsive force between the magnets is also small, and therefore the magnets (2), (
3) can be easily assembled by connecting and fixing it to the yoke (4) in a magnetized state.

On the other hand, in the case of a magnet with a large energy product such as a cloth magnet, the repulsion during assembly and the electromagnetic force of the suction bar are large, making assembly difficult. This is particularly difficult when the connection surface is smooth.

FIGS. 6(a) and 6(b) are explanatory diagrams showing a conventional method of fixing magnets. In the above case, each magnet (2) and (3) in a demagnetized state is usually separately attached to a yoke ( 4), each is magnetized with opposite polarity, and then assembled using a suitable jig.

[Problem to be solved by the invention]

However, the method described above has the disadvantage that the degree of freedom in assembly is small;
In sputtering equipment, it is difficult to precisely control the magnetic field distribution on the upper surface of the target material (1).

An object of the present invention is to provide a method for fixing a magnet in a magnetic field generating structure, which eliminates the above-mentioned drawbacks.

[Means to solve the problem]

That is, the gist of the present invention is to provide a permanent magnet and a magnetic yoke with a convex portion or a concave portion, and to fit the convex portion and the concave portion to connect and fix the permanent magnets or the yoke and the permanent magnet to each other. A method for fixing a permanent magnet in a magnetic field generating structure, characterized by:

[Effect]

The convex portions and concave portions provided on the permanent magnet and the magnetic yoke facilitate the work of connecting and fixing the two.

〔Example〕

Hereinafter, the present invention will be explained in detail using the magnetron sputtering apparatus shown in FIG. 3 as an example of a magnetic field generating structure.
The present invention is not limited to the following examples unless it exceeds the gist thereof.

FIG. 3(a) is a perspective view of a magnetron sputtering apparatus previously proposed by the present inventor in Japanese Patent Application No. 1-17704, and FIG. 3(b) is a perspective view of the magnetron sputtering device shown in FIG. It is a sectional view between Pb.

In the device shown in FIGS. 3(a) and 3(b), both the inner magnetic pole (2) and the outer magnetic pole (3) are made of soft magnetic material, and there is horizontal magnetization between the two magnetic poles. permanent magnet(
5) is provided on the outer surface of the outer magnetic pole (3), and is usually assembled by a block of cloth-covered plastic magnets in a magnetized state, and has a magnetization direction opposite to that of the permanent magnet (5). An auxiliary permanent magnet (6) is provided,
It has a structure that precisely controls the magnetic field distribution on the target material (1). Note that (7) is a soft magnetic material for adjusting magnetic field distribution.

FIG. 1 is an explanatory diagram showing one embodiment of the present invention, and FIG.
This figure shows the outer magnetic pole (3) and the auxiliary permanent magnet (6) made up of two blocks placed outside of the outer magnetic pole (3).

A convex portion (9) is provided on the outer surface of the outer magnetic pole (3), and a concave portion (1) that fits into the convex portion is provided on the inside of the auxiliary permanent magnet (6).
0) is provided.

When connecting and fixing the auxiliary permanent magnet (6) to the outer magnetic pole (3), as shown in FIG. The upper auxiliary permanent magnet (6) is then fixed in the same manner. In this case, each auxiliary permanent magnet (6
) and (6) repel each other because they have magnetization in the same direction (indicated by arrows in the figure), but if they are connected and fixed using the method described above, the assembly work can be easily performed. Also,
When the convex part (9) of the outer magnetic pole (3) and the concave part (10) of the auxiliary permanent magnet (6) both have a continuous structure as shown in the figure, the lower auxiliary permanent magnet (6) The assembly work will be further facilitated by fitting the upper auxiliary permanent magnet (6) from the disengaged position and sliding the two together.

FIG. 2 is an explanatory diagram showing another embodiment of the present invention, and shows how a yoke (soft magnetic material) (4) and a permanent magnet (8) are connected and fixed. In this case, as shown in Figure 2,
The convex part provided on the outer surface of the yoke (4) and the permanent magnet (8
) A loop of magnetic flux occurs locally in the recess, and this creates an attractive force between the yoke (4) and the permanent magnet (8).
The repulsive force between the magnets is weakened, making assembly easier.

In any of the above cases, as shown in FIG. 1, it is preferable to use screws for fixing in addition to the projections and recesses. Figure rl8 (1o) and (11') show screw holes, and (12) shows a screw.

When fixing with screws is also used, the magnet can be removed and attached any number of times, the magnetization strength of the permanent magnet can be freely adjusted, and the magnetic field distribution can be precisely set even more easily.

Conventionally, when assembling a large magnetron using permanent magnets, it was necessary to use ferrite, which has a low energy product, and to create a magnetron with a structure as shown in FIG. 4.

However, according to the magnet fixing method of the present invention, it is possible to easily assemble a large magnetron using a magnet with a large energy product, and furthermore, it is possible to assemble a magnet in a magnetized state.

For example, according to the magnet fixing method of the present invention, the magnetron sputtering device shown in FIG. ), it is possible to realize a Magne 1 Heron with a length of 1000 mm in the longitudinal direction, a length of 220 mm in the transverse direction, and a height of 70 mm.

Furthermore, in the present invention, in addition to protrusions and recesses, the magnet is provided with screw holes as necessary, so a structurally strong plastic magnet is optimal as the magnet to be used.

〔Effect of the invention〕

According to the method of the present invention described above, the magnet can be easily fixed and assembled, so the degree of freedom in adjusting the structure of the magnetron and the magnetization strength of the magnet is greatly improved, and a precise magnetic field distribution can be achieved. It becomes possible to manufacture magnetrons.

[Brief explanation of the drawing]

FIG. 1 is an explanatory diagram showing one embodiment of the present invention, and FIG. 2 is an explanatory diagram showing an embodiment of the present invention.
FIG. 3(a), an explanatory view showing another embodiment of the present invention, is a perspective view of a magnetron sputtering apparatus previously proposed by the inventor in Japanese Patent Application No. 1-17704, and FIG. 3(b)
) is a sectional view along Pa-Pb in FIG. 3(a), FIG. 4 is a perspective view of a conventional magnetron for sputtering equipment, and FIG.
The figure is an explanatory diagram of a state in which a target is installed in the magnetron shown in FIG. 4, and FIGS. 6(a) and (b) are explanatory diagrams showing a conventional method of fixing a magnet. In the figure, (1) is the target material, (2) is the inner magnetic pole, and (3) is the target material.
) is the outer magnetic pole, (4) is the yoke, (5), (6), (8
) is a permanent magnet, (7) is a soft magnetic material, (9) is a convex part, (1
0) is a recess, (11), (11') are screw holes, (12)
indicates a screw.

Claims (4)

[Claims] (1) A magnetic field characterized by providing a permanent magnet and a magnetic yoke with a convex portion or a concave portion, and by fitting these convex portions and concave portions, the permanent magnets or the yoke and the permanent magnet are connected and fixed to each other. A method of fixing a permanent magnet in a generating structure. (2) The method according to claim 1, wherein the magnetic field generating structure is a magnetron for a sputtering device. (3) The magnetic field generating structure is mainly composed of an inner magnetic pole having perpendicular magnetization and an outer magnetic pole surrounding the inner magnetic pole and having opposite polarity, and both of the magnetic poles are made of a soft magnetic material, and A magnetron for a sputtering device, wherein a permanent magnet having horizontal magnetization is provided between the two magnetic poles, and a permanent magnet having magnetization in a direction opposite to that of the outer magnetic pole is provided on the outer surface of the outer magnetic pole. 3. A method according to claim 2, characterized in that: (4) The method according to any one of claims 1 to 3, wherein the permanent magnet is a plastic magnet.