JPH0462452B2 - - Google Patents
Info
- Publication number
- JPH0462452B2 JPH0462452B2 JP61293158A JP29315886A JPH0462452B2 JP H0462452 B2 JPH0462452 B2 JP H0462452B2 JP 61293158 A JP61293158 A JP 61293158A JP 29315886 A JP29315886 A JP 29315886A JP H0462452 B2 JPH0462452 B2 JP H0462452B2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- alignment
- pattern
- data
- reticle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61293158A JPS62169329A (ja) | 1986-12-09 | 1986-12-09 | アライメント方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61293158A JPS62169329A (ja) | 1986-12-09 | 1986-12-09 | アライメント方法 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57135498A Division JPS5927525A (ja) | 1982-08-03 | 1982-08-03 | アライメント方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62169329A JPS62169329A (ja) | 1987-07-25 |
| JPH0462452B2 true JPH0462452B2 (enrdf_load_stackoverflow) | 1992-10-06 |
Family
ID=17791169
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61293158A Granted JPS62169329A (ja) | 1986-12-09 | 1986-12-09 | アライメント方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62169329A (enrdf_load_stackoverflow) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51111076A (en) * | 1975-03-26 | 1976-10-01 | Hitachi Ltd | Exposure device |
| JPS5541739A (en) * | 1978-09-20 | 1980-03-24 | Hitachi Ltd | Micro-projection type mask alignment device |
-
1986
- 1986-12-09 JP JP61293158A patent/JPS62169329A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62169329A (ja) | 1987-07-25 |
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