JPH046214B2 - - Google Patents
Info
- Publication number
- JPH046214B2 JPH046214B2 JP59274332A JP27433284A JPH046214B2 JP H046214 B2 JPH046214 B2 JP H046214B2 JP 59274332 A JP59274332 A JP 59274332A JP 27433284 A JP27433284 A JP 27433284A JP H046214 B2 JPH046214 B2 JP H046214B2
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- gas
- processing chamber
- injection port
- processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000007788 liquid Substances 0.000 claims description 11
- 238000002347 injection Methods 0.000 claims description 8
- 239000007924 injection Substances 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 4
- 230000035699 permeability Effects 0.000 claims description 4
- 239000002861 polymer material Substances 0.000 claims description 4
- 238000003672 processing method Methods 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 48
- 238000000034 method Methods 0.000 description 12
- 238000009832 plasma treatment Methods 0.000 description 11
- 238000005192 partition Methods 0.000 description 8
- 239000012495 reaction gas Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 239000002828 fuel tank Substances 0.000 description 3
- 229920005672 polyolefin resin Polymers 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229930195733 hydrocarbon Natural products 0.000 description 2
- 150000002430 hydrocarbons Chemical class 0.000 description 2
- 230000000873 masking effect Effects 0.000 description 2
- 238000010422 painting Methods 0.000 description 2
- 238000010926 purge Methods 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000002715 modification method Methods 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
Landscapes
- Application Of Or Painting With Fluid Materials (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27433284A JPS61155430A (ja) | 1984-12-28 | 1984-12-28 | プラズマ処理方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27433284A JPS61155430A (ja) | 1984-12-28 | 1984-12-28 | プラズマ処理方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61155430A JPS61155430A (ja) | 1986-07-15 |
| JPH046214B2 true JPH046214B2 (fr) | 1992-02-05 |
Family
ID=17540177
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27433284A Granted JPS61155430A (ja) | 1984-12-28 | 1984-12-28 | プラズマ処理方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61155430A (fr) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3844151B2 (ja) * | 1997-05-14 | 2006-11-08 | 凸版印刷株式会社 | 表面処理装置 |
| DE102005029360B4 (de) * | 2005-06-24 | 2011-11-10 | Softal Corona & Plasma Gmbh | Zwei Verfahren zur kontinuierlichen Atmosphärendruck Plasmabehandlung von Werkstücken, insbesondere Materialplatten oder -bahnen |
| JP6224139B2 (ja) * | 2016-01-22 | 2017-11-01 | 沖野 晃俊 | プラズマ処理装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS515869A (en) * | 1974-07-02 | 1976-01-19 | Torao Tobisu | Ekitaino seidenjokasochi |
| JPS59126437A (ja) * | 1983-01-07 | 1984-07-21 | Unitika Ltd | シ−ト状物の低温プラズマ処理方法 |
-
1984
- 1984-12-28 JP JP27433284A patent/JPS61155430A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS515869A (en) * | 1974-07-02 | 1976-01-19 | Torao Tobisu | Ekitaino seidenjokasochi |
| JPS59126437A (ja) * | 1983-01-07 | 1984-07-21 | Unitika Ltd | シ−ト状物の低温プラズマ処理方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61155430A (ja) | 1986-07-15 |
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