JPH046214B2 - - Google Patents

Info

Publication number
JPH046214B2
JPH046214B2 JP59274332A JP27433284A JPH046214B2 JP H046214 B2 JPH046214 B2 JP H046214B2 JP 59274332 A JP59274332 A JP 59274332A JP 27433284 A JP27433284 A JP 27433284A JP H046214 B2 JPH046214 B2 JP H046214B2
Authority
JP
Japan
Prior art keywords
plasma
gas
processing chamber
injection port
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59274332A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61155430A (ja
Inventor
Junichi Kasai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Isuzu Motors Ltd
Original Assignee
Isuzu Motors Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Isuzu Motors Ltd filed Critical Isuzu Motors Ltd
Priority to JP27433284A priority Critical patent/JPS61155430A/ja
Publication of JPS61155430A publication Critical patent/JPS61155430A/ja
Publication of JPH046214B2 publication Critical patent/JPH046214B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
JP27433284A 1984-12-28 1984-12-28 プラズマ処理方法 Granted JPS61155430A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27433284A JPS61155430A (ja) 1984-12-28 1984-12-28 プラズマ処理方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27433284A JPS61155430A (ja) 1984-12-28 1984-12-28 プラズマ処理方法

Publications (2)

Publication Number Publication Date
JPS61155430A JPS61155430A (ja) 1986-07-15
JPH046214B2 true JPH046214B2 (enrdf_load_stackoverflow) 1992-02-05

Family

ID=17540177

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27433284A Granted JPS61155430A (ja) 1984-12-28 1984-12-28 プラズマ処理方法

Country Status (1)

Country Link
JP (1) JPS61155430A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3844151B2 (ja) * 1997-05-14 2006-11-08 凸版印刷株式会社 表面処理装置
DE102005029360B4 (de) * 2005-06-24 2011-11-10 Softal Corona & Plasma Gmbh Zwei Verfahren zur kontinuierlichen Atmosphärendruck Plasmabehandlung von Werkstücken, insbesondere Materialplatten oder -bahnen
JP6224139B2 (ja) * 2016-01-22 2017-11-01 沖野　晃俊 プラズマ処理装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS515869A (en) * 1974-07-02 1976-01-19 Torao Tobisu Ekitaino seidenjokasochi
JPS59126437A (ja) * 1983-01-07 1984-07-21 Unitika Ltd シ−ト状物の低温プラズマ処理方法

Also Published As

Publication number Publication date
JPS61155430A (ja) 1986-07-15

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