JPH0461331B2 - - Google Patents
Info
- Publication number
- JPH0461331B2 JPH0461331B2 JP14582685A JP14582685A JPH0461331B2 JP H0461331 B2 JPH0461331 B2 JP H0461331B2 JP 14582685 A JP14582685 A JP 14582685A JP 14582685 A JP14582685 A JP 14582685A JP H0461331 B2 JPH0461331 B2 JP H0461331B2
- Authority
- JP
- Japan
- Prior art keywords
- diffraction grating
- region
- photoresist film
- substrate
- beam interference
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Diffracting Gratings Or Hologram Optical Elements (AREA)
- Semiconductor Lasers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14582685A JPS627002A (ja) | 1985-07-04 | 1985-07-04 | 位相シフト回折格子の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14582685A JPS627002A (ja) | 1985-07-04 | 1985-07-04 | 位相シフト回折格子の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS627002A JPS627002A (ja) | 1987-01-14 |
| JPH0461331B2 true JPH0461331B2 (cs) | 1992-09-30 |
Family
ID=15394013
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14582685A Granted JPS627002A (ja) | 1985-07-04 | 1985-07-04 | 位相シフト回折格子の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS627002A (cs) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5792528A (en) * | 1994-06-17 | 1998-08-11 | Atomic Energy Corporation Of South Africa Limited | Process for the production of plastic components for containing and/or transporting fluids |
| KR102444339B1 (ko) * | 2017-11-21 | 2022-09-19 | 어플라이드 머티어리얼스, 인코포레이티드 | 도파관 결합기들의 제조 방법 |
| KR102562250B1 (ko) | 2017-11-29 | 2023-08-02 | 어플라이드 머티어리얼스, 인코포레이티드 | 도파관 결합기들의 방향성 식각 제조 방법 |
-
1985
- 1985-07-04 JP JP14582685A patent/JPS627002A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS627002A (ja) | 1987-01-14 |
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