JPH0460568U - - Google Patents
Info
- Publication number
- JPH0460568U JPH0460568U JP10240190U JP10240190U JPH0460568U JP H0460568 U JPH0460568 U JP H0460568U JP 10240190 U JP10240190 U JP 10240190U JP 10240190 U JP10240190 U JP 10240190U JP H0460568 U JPH0460568 U JP H0460568U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum chamber
- main body
- body case
- vacuum pump
- power supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012808 vapor phase Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 2
- 239000007789 gas Substances 0.000 claims 4
- 230000008021 deposition Effects 0.000 claims 2
- 230000002093 peripheral effect Effects 0.000 claims 1
- 239000012495 reaction gas Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10240190U JPH0460568U (cg-RX-API-DMAC7.html) | 1990-09-28 | 1990-09-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10240190U JPH0460568U (cg-RX-API-DMAC7.html) | 1990-09-28 | 1990-09-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0460568U true JPH0460568U (cg-RX-API-DMAC7.html) | 1992-05-25 |
Family
ID=31846627
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10240190U Pending JPH0460568U (cg-RX-API-DMAC7.html) | 1990-09-28 | 1990-09-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0460568U (cg-RX-API-DMAC7.html) |
-
1990
- 1990-09-28 JP JP10240190U patent/JPH0460568U/ja active Pending
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