JPH0458957U - - Google Patents
Info
- Publication number
- JPH0458957U JPH0458957U JP10037590U JP10037590U JPH0458957U JP H0458957 U JPH0458957 U JP H0458957U JP 10037590 U JP10037590 U JP 10037590U JP 10037590 U JP10037590 U JP 10037590U JP H0458957 U JPH0458957 U JP H0458957U
- Authority
- JP
- Japan
- Prior art keywords
- ion
- scanning
- target
- mask
- upper base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005468 ion implantation Methods 0.000 claims description 4
- 238000010884 ion-beam technique Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 4
- 238000001819 mass spectrum Methods 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10037590U JPH0458957U (sl) | 1990-09-25 | 1990-09-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10037590U JPH0458957U (sl) | 1990-09-25 | 1990-09-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0458957U true JPH0458957U (sl) | 1992-05-20 |
Family
ID=31842980
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10037590U Pending JPH0458957U (sl) | 1990-09-25 | 1990-09-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0458957U (sl) |
-
1990
- 1990-09-25 JP JP10037590U patent/JPH0458957U/ja active Pending
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