JPH0458890B2 - - Google Patents
Info
- Publication number
- JPH0458890B2 JPH0458890B2 JP25288485A JP25288485A JPH0458890B2 JP H0458890 B2 JPH0458890 B2 JP H0458890B2 JP 25288485 A JP25288485 A JP 25288485A JP 25288485 A JP25288485 A JP 25288485A JP H0458890 B2 JPH0458890 B2 JP H0458890B2
- Authority
- JP
- Japan
- Prior art keywords
- laser beam
- measured
- semiconductor substrate
- measurement control
- power
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 27
- 238000005259 measurement Methods 0.000 claims description 25
- 239000004065 semiconductor Substances 0.000 claims description 21
- 238000000034 method Methods 0.000 claims description 4
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000010521 absorption reaction Methods 0.000 description 9
- 230000003287 optical effect Effects 0.000 description 5
- 238000001816 cooling Methods 0.000 description 4
- 230000003321 amplification Effects 0.000 description 3
- 239000003574 free electron Substances 0.000 description 3
- 238000000691 measurement method Methods 0.000 description 3
- 238000003199 nucleic acid amplification method Methods 0.000 description 3
- 239000006096 absorbing agent Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910052732 germanium Inorganic materials 0.000 description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J1/4257—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25288485A JPS62113031A (ja) | 1985-11-13 | 1985-11-13 | レ−ザパワ−測定方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25288485A JPS62113031A (ja) | 1985-11-13 | 1985-11-13 | レ−ザパワ−測定方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62113031A JPS62113031A (ja) | 1987-05-23 |
| JPH0458890B2 true JPH0458890B2 (enrdf_load_stackoverflow) | 1992-09-18 |
Family
ID=17243499
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25288485A Granted JPS62113031A (ja) | 1985-11-13 | 1985-11-13 | レ−ザパワ−測定方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62113031A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0610827U (ja) * | 1992-07-09 | 1994-02-10 | 株式会社自由電子レーザ研究所 | レーザ光および電子ビームの検出器 |
| BE1007005A3 (nl) * | 1993-04-16 | 1995-02-14 | Vito | Inrichting voor het bepalen van het vermogen van een energieflux. |
-
1985
- 1985-11-13 JP JP25288485A patent/JPS62113031A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62113031A (ja) | 1987-05-23 |
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