JPH0458891B2 - - Google Patents
Info
- Publication number
- JPH0458891B2 JPH0458891B2 JP25672585A JP25672585A JPH0458891B2 JP H0458891 B2 JPH0458891 B2 JP H0458891B2 JP 25672585 A JP25672585 A JP 25672585A JP 25672585 A JP25672585 A JP 25672585A JP H0458891 B2 JPH0458891 B2 JP H0458891B2
- Authority
- JP
- Japan
- Prior art keywords
- laser beam
- measured
- measurement control
- power density
- control laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005259 measurement Methods 0.000 claims description 25
- 239000004065 semiconductor Substances 0.000 claims description 14
- 239000000758 substrate Substances 0.000 claims description 14
- 238000000034 method Methods 0.000 claims description 5
- 238000010521 absorption reaction Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 2
- 230000003321 amplification Effects 0.000 description 2
- 239000003574 free electron Substances 0.000 description 2
- 229910052732 germanium Inorganic materials 0.000 description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000001739 density measurement Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000010979 ruby Substances 0.000 description 1
- 229910001750 ruby Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J1/4257—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25672585A JPS62118220A (ja) | 1985-11-18 | 1985-11-18 | レ−ザ光のパワ−密度測定方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25672585A JPS62118220A (ja) | 1985-11-18 | 1985-11-18 | レ−ザ光のパワ−密度測定方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62118220A JPS62118220A (ja) | 1987-05-29 |
| JPH0458891B2 true JPH0458891B2 (enrdf_load_stackoverflow) | 1992-09-18 |
Family
ID=17296579
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25672585A Granted JPS62118220A (ja) | 1985-11-18 | 1985-11-18 | レ−ザ光のパワ−密度測定方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62118220A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0610827U (ja) * | 1992-07-09 | 1994-02-10 | 株式会社自由電子レーザ研究所 | レーザ光および電子ビームの検出器 |
| BE1007005A3 (nl) * | 1993-04-16 | 1995-02-14 | Vito | Inrichting voor het bepalen van het vermogen van een energieflux. |
-
1985
- 1985-11-18 JP JP25672585A patent/JPS62118220A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62118220A (ja) | 1987-05-29 |
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