JPH04565B2 - - Google Patents
Info
- Publication number
- JPH04565B2 JPH04565B2 JP17345183A JP17345183A JPH04565B2 JP H04565 B2 JPH04565 B2 JP H04565B2 JP 17345183 A JP17345183 A JP 17345183A JP 17345183 A JP17345183 A JP 17345183A JP H04565 B2 JPH04565 B2 JP H04565B2
- Authority
- JP
- Japan
- Prior art keywords
- zrsi
- batio
- glass frit
- powder
- thick film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 31
- 229910006249 ZrSi Inorganic materials 0.000 claims description 24
- 239000000843 powder Substances 0.000 claims description 20
- 238000000034 method Methods 0.000 claims description 9
- 239000000203 mixture Substances 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims description 8
- 239000000758 substrate Substances 0.000 claims description 7
- 238000010304 firing Methods 0.000 claims description 4
- 239000011521 glass Substances 0.000 description 18
- 239000010408 film Substances 0.000 description 17
- 238000010438 heat treatment Methods 0.000 description 12
- 239000002482 conductive additive Substances 0.000 description 7
- 230000000694 effects Effects 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 230000035939 shock Effects 0.000 description 4
- WUOACPNHFRMFPN-SECBINFHSA-N (S)-(-)-alpha-terpineol Chemical compound CC1=CC[C@@H](C(C)(C)O)CC1 WUOACPNHFRMFPN-SECBINFHSA-N 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- OVKDFILSBMEKLT-UHFFFAOYSA-N alpha-Terpineol Natural products CC(=C)C1(O)CCC(C)=CC1 OVKDFILSBMEKLT-UHFFFAOYSA-N 0.000 description 3
- 229940088601 alpha-terpineol Drugs 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000007650 screen-printing Methods 0.000 description 3
- 239000004020 conductor Substances 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 238000010298 pulverizing process Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Thermistors And Varistors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17345183A JPS6064406A (ja) | 1983-09-19 | 1983-09-19 | 厚膜型正特性半導体素子の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17345183A JPS6064406A (ja) | 1983-09-19 | 1983-09-19 | 厚膜型正特性半導体素子の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6064406A JPS6064406A (ja) | 1985-04-13 |
| JPH04565B2 true JPH04565B2 (en, 2012) | 1992-01-08 |
Family
ID=15960707
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17345183A Granted JPS6064406A (ja) | 1983-09-19 | 1983-09-19 | 厚膜型正特性半導体素子の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6064406A (en, 2012) |
-
1983
- 1983-09-19 JP JP17345183A patent/JPS6064406A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6064406A (ja) | 1985-04-13 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH04565B2 (en, 2012) | ||
| JPH0534808B2 (en, 2012) | ||
| JPH04365B2 (en, 2012) | ||
| JPH04364B2 (en, 2012) | ||
| JPH0534807B2 (en, 2012) | ||
| JPH0534803B2 (en, 2012) | ||
| JPH0534804B2 (en, 2012) | ||
| JPH0534805B2 (en, 2012) | ||
| JPS61101008A (ja) | 厚膜型正特性半導体素子の製造方法 | |
| JPH04564B2 (en, 2012) | ||
| JPH0534806B2 (en, 2012) | ||
| JPH0558242B2 (en, 2012) | ||
| JPH0534802B2 (en, 2012) | ||
| JPH04563B2 (en, 2012) | ||
| JPH04562B2 (en, 2012) | ||
| JPH04366B2 (en, 2012) | ||
| JPH0558244B2 (en, 2012) | ||
| JPH0313722B2 (en, 2012) | ||
| JPH0558241B2 (en, 2012) | ||
| JPH0558243B2 (en, 2012) | ||
| JPH061722B2 (ja) | 厚膜型正特性半導体素子の製造方法 | |
| JPS6158209A (ja) | 厚膜型正特性半導体素子の製造方法 | |
| JPH04362B2 (en, 2012) | ||
| JPS61101007A (ja) | 厚膜型正特性半導体素子の製造方法 | |
| JPS61101009A (ja) | 厚膜型正特性半導体素子の製造方法 |