JPH045636U - - Google Patents

Info

Publication number
JPH045636U
JPH045636U JP4638890U JP4638890U JPH045636U JP H045636 U JPH045636 U JP H045636U JP 4638890 U JP4638890 U JP 4638890U JP 4638890 U JP4638890 U JP 4638890U JP H045636 U JPH045636 U JP H045636U
Authority
JP
Japan
Prior art keywords
susceptors
cvd
boat
supplied
power source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4638890U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4638890U priority Critical patent/JPH045636U/ja
Publication of JPH045636U publication Critical patent/JPH045636U/ja
Pending legal-status Critical Current

Links

JP4638890U 1990-04-27 1990-04-27 Pending JPH045636U (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4638890U JPH045636U (zh) 1990-04-27 1990-04-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4638890U JPH045636U (zh) 1990-04-27 1990-04-27

Publications (1)

Publication Number Publication Date
JPH045636U true JPH045636U (zh) 1992-01-20

Family

ID=31561432

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4638890U Pending JPH045636U (zh) 1990-04-27 1990-04-27

Country Status (1)

Country Link
JP (1) JPH045636U (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0289599A (ja) * 1988-09-27 1990-03-29 Idea Res:Kk 金属材料又は合成樹脂材料等の強化方法
JP2013251367A (ja) * 2012-05-31 2013-12-12 Shimadzu Corp プラズマｃｖｄ成膜装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0289599A (ja) * 1988-09-27 1990-03-29 Idea Res:Kk 金属材料又は合成樹脂材料等の強化方法
JP2013251367A (ja) * 2012-05-31 2013-12-12 Shimadzu Corp プラズマｃｖｄ成膜装置

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