JPH0455307A - 薄肉多結晶シリコンシートの製造方法 - Google Patents
薄肉多結晶シリコンシートの製造方法Info
- Publication number
- JPH0455307A JPH0455307A JP16634790A JP16634790A JPH0455307A JP H0455307 A JPH0455307 A JP H0455307A JP 16634790 A JP16634790 A JP 16634790A JP 16634790 A JP16634790 A JP 16634790A JP H0455307 A JPH0455307 A JP H0455307A
- Authority
- JP
- Japan
- Prior art keywords
- silicon
- nozzle
- mold nozzle
- sheet
- solidified
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 62
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 62
- 239000010703 silicon Substances 0.000 title claims abstract description 62
- 238000004519 manufacturing process Methods 0.000 title claims description 15
- 239000000758 substrate Substances 0.000 claims abstract description 16
- 238000002844 melting Methods 0.000 claims abstract description 8
- 230000008018 melting Effects 0.000 claims abstract description 8
- 239000000463 material Substances 0.000 claims abstract description 6
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 30
- 229920001296 polysiloxane Polymers 0.000 claims description 6
- 238000000926 separation method Methods 0.000 claims description 4
- 238000003825 pressing Methods 0.000 claims description 2
- 238000002347 injection Methods 0.000 abstract description 13
- 239000007924 injection Substances 0.000 abstract description 13
- 238000005266 casting Methods 0.000 abstract description 9
- 239000011261 inert gas Substances 0.000 abstract description 3
- 238000000034 method Methods 0.000 description 23
- 239000013078 crystal Substances 0.000 description 7
- 235000012431 wafers Nutrition 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 239000000155 melt Substances 0.000 description 3
- 239000012779 reinforcing material Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 210000000936 intestine Anatomy 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 230000005499 meniscus Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000009736 wetting Methods 0.000 description 1
Landscapes
- Silicon Compounds (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16634790A JPH0455307A (ja) | 1990-06-25 | 1990-06-25 | 薄肉多結晶シリコンシートの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16634790A JPH0455307A (ja) | 1990-06-25 | 1990-06-25 | 薄肉多結晶シリコンシートの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0455307A true JPH0455307A (ja) | 1992-02-24 |
| JPH0478565B2 JPH0478565B2 (enrdf_load_stackoverflow) | 1992-12-11 |
Family
ID=15829694
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16634790A Granted JPH0455307A (ja) | 1990-06-25 | 1990-06-25 | 薄肉多結晶シリコンシートの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0455307A (enrdf_load_stackoverflow) |
-
1990
- 1990-06-25 JP JP16634790A patent/JPH0455307A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0478565B2 (enrdf_load_stackoverflow) | 1992-12-11 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |