JPH0455042U - - Google Patents

Info

Publication number
JPH0455042U
JPH0455042U JP9830890U JP9830890U JPH0455042U JP H0455042 U JPH0455042 U JP H0455042U JP 9830890 U JP9830890 U JP 9830890U JP 9830890 U JP9830890 U JP 9830890U JP H0455042 U JPH0455042 U JP H0455042U
Authority
JP
Japan
Prior art keywords
pattern
phase shifter
photomask
light
alignment accuracy
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9830890U
Other languages
English (en)
Japanese (ja)
Other versions
JP2551102Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9830890U priority Critical patent/JP2551102Y2/ja
Publication of JPH0455042U publication Critical patent/JPH0455042U/ja
Application granted granted Critical
Publication of JP2551102Y2 publication Critical patent/JP2551102Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP9830890U 1990-09-19 1990-09-19 位相シフト層を有するフォトマスク Expired - Lifetime JP2551102Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9830890U JP2551102Y2 (ja) 1990-09-19 1990-09-19 位相シフト層を有するフォトマスク

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9830890U JP2551102Y2 (ja) 1990-09-19 1990-09-19 位相シフト層を有するフォトマスク

Publications (2)

Publication Number Publication Date
JPH0455042U true JPH0455042U (enrdf_load_html_response) 1992-05-12
JP2551102Y2 JP2551102Y2 (ja) 1997-10-22

Family

ID=31839385

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9830890U Expired - Lifetime JP2551102Y2 (ja) 1990-09-19 1990-09-19 位相シフト層を有するフォトマスク

Country Status (1)

Country Link
JP (1) JP2551102Y2 (enrdf_load_html_response)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06308712A (ja) * 1993-02-17 1994-11-04 Nec Corp 位相シフトマスクおよびその検査方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06308712A (ja) * 1993-02-17 1994-11-04 Nec Corp 位相シフトマスクおよびその検査方法

Also Published As

Publication number Publication date
JP2551102Y2 (ja) 1997-10-22

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term