JPH0454457Y2 - - Google Patents
Info
- Publication number
- JPH0454457Y2 JPH0454457Y2 JP1985191208U JP19120885U JPH0454457Y2 JP H0454457 Y2 JPH0454457 Y2 JP H0454457Y2 JP 1985191208 U JP1985191208 U JP 1985191208U JP 19120885 U JP19120885 U JP 19120885U JP H0454457 Y2 JPH0454457 Y2 JP H0454457Y2
- Authority
- JP
- Japan
- Prior art keywords
- mirror
- interference
- optical flat
- laser beam
- vibration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 claims description 24
- 238000006243 chemical reaction Methods 0.000 claims description 11
- 230000001133 acceleration Effects 0.000 claims description 9
- 238000005259 measurement Methods 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 8
- 239000010408 film Substances 0.000 description 4
- 239000012528 membrane Substances 0.000 description 4
- 230000036316 preload Effects 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- 229920003023 plastic Polymers 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005520 electrodynamics Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Landscapes
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985191208U JPH0454457Y2 (zh) | 1985-12-12 | 1985-12-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985191208U JPH0454457Y2 (zh) | 1985-12-12 | 1985-12-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6297960U JPS6297960U (zh) | 1987-06-22 |
| JPH0454457Y2 true JPH0454457Y2 (zh) | 1992-12-21 |
Family
ID=31145135
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985191208U Expired JPH0454457Y2 (zh) | 1985-12-12 | 1985-12-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0454457Y2 (zh) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016156818A (ja) * | 2015-02-23 | 2016-09-01 | ザ・ボード・オブ・トラスティーズ・オブ・ザ・リーランド・スタンフォード・ジュニア・ユニバーシティ | 位相面変調センサと、製造方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5646469A (en) * | 1979-09-07 | 1981-04-27 | Siemens Ag | Method of measuring speed of rotation employing ring interference gage |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5160279U (zh) * | 1974-11-05 | 1976-05-12 |
-
1985
- 1985-12-12 JP JP1985191208U patent/JPH0454457Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5646469A (en) * | 1979-09-07 | 1981-04-27 | Siemens Ag | Method of measuring speed of rotation employing ring interference gage |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016156818A (ja) * | 2015-02-23 | 2016-09-01 | ザ・ボード・オブ・トラスティーズ・オブ・ザ・リーランド・スタンフォード・ジュニア・ユニバーシティ | 位相面変調センサと、製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6297960U (zh) | 1987-06-22 |
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