JPH0454139U - - Google Patents
Info
- Publication number
- JPH0454139U JPH0454139U JP9609490U JP9609490U JPH0454139U JP H0454139 U JPH0454139 U JP H0454139U JP 9609490 U JP9609490 U JP 9609490U JP 9609490 U JP9609490 U JP 9609490U JP H0454139 U JPH0454139 U JP H0454139U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- moving mechanism
- vacuum
- sample chamber
- electron microscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims description 2
- 239000000463 material Substances 0.000 claims description 2
- 239000004020 conductor Substances 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 description 2
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9609490U JPH0454139U (enExample) | 1990-09-14 | 1990-09-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9609490U JPH0454139U (enExample) | 1990-09-14 | 1990-09-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0454139U true JPH0454139U (enExample) | 1992-05-08 |
Family
ID=31835357
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9609490U Pending JPH0454139U (enExample) | 1990-09-14 | 1990-09-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0454139U (enExample) |
-
1990
- 1990-09-14 JP JP9609490U patent/JPH0454139U/ja active Pending
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