JPS6423865U - - Google Patents

Info

Publication number
JPS6423865U
JPS6423865U JP11782887U JP11782887U JPS6423865U JP S6423865 U JPS6423865 U JP S6423865U JP 11782887 U JP11782887 U JP 11782887U JP 11782887 U JP11782887 U JP 11782887U JP S6423865 U JPS6423865 U JP S6423865U
Authority
JP
Japan
Prior art keywords
electron
electron beam
deflection
deflection electrodes
stages
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11782887U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11782887U priority Critical patent/JPS6423865U/ja
Publication of JPS6423865U publication Critical patent/JPS6423865U/ja
Pending legal-status Critical Current

Links

JP11782887U 1987-07-31 1987-07-31 Pending JPS6423865U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11782887U JPS6423865U (enExample) 1987-07-31 1987-07-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11782887U JPS6423865U (enExample) 1987-07-31 1987-07-31

Publications (1)

Publication Number Publication Date
JPS6423865U true JPS6423865U (enExample) 1989-02-08

Family

ID=31361627

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11782887U Pending JPS6423865U (enExample) 1987-07-31 1987-07-31

Country Status (1)

Country Link
JP (1) JPS6423865U (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013161858A (ja) * 2012-02-02 2013-08-19 Nuflare Technology Inc 荷電粒子ビーム描画装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013161858A (ja) * 2012-02-02 2013-08-19 Nuflare Technology Inc 荷電粒子ビーム描画装置

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