JPH0452994Y2 - - Google Patents
Info
- Publication number
- JPH0452994Y2 JPH0452994Y2 JP10076686U JP10076686U JPH0452994Y2 JP H0452994 Y2 JPH0452994 Y2 JP H0452994Y2 JP 10076686 U JP10076686 U JP 10076686U JP 10076686 U JP10076686 U JP 10076686U JP H0452994 Y2 JPH0452994 Y2 JP H0452994Y2
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- substrate
- sample chamber
- chamber
- extraction window
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 49
- 238000000605 extraction Methods 0.000 claims description 15
- 230000002265 prevention Effects 0.000 claims description 9
- 230000008021 deposition Effects 0.000 claims description 8
- 230000009471 action Effects 0.000 claims description 3
- 239000010408 film Substances 0.000 description 27
- 238000004519 manufacturing process Methods 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- 239000007795 chemical reaction product Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 239000012495 reaction gas Substances 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10076686U JPH0452994Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-06-28 | 1986-06-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10076686U JPH0452994Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-06-28 | 1986-06-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS635635U JPS635635U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-01-14 |
| JPH0452994Y2 true JPH0452994Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1992-12-14 |
Family
ID=30970895
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10076686U Expired JPH0452994Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-06-28 | 1986-06-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0452994Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011125471A1 (ja) * | 2010-03-31 | 2011-10-13 | 東京エレクトロン株式会社 | プラズマ処理装置及びプラズマ処理方法 |
-
1986
- 1986-06-28 JP JP10076686U patent/JPH0452994Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS635635U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-01-14 |