JPH045248Y2 - - Google Patents

Description

[Detailed description of the invention] [Industrial application field] This invention is a device for polishing the surfaces of thin metal parts of machines, ceramics of electrical and electronic parts, glass used for chemical/biological parts, optical parts, etc. Regarding. As the performance of electrical and electronic equipment parts improves and becomes more compact, these parts are required to have thinner walls as well as surface precision. This is what we provide.

[Conventional technology]

A device for polishing one or both sides of a workpiece, which is the base of the above-mentioned parts, is well known as a device for wrapping or polishing, and for example,
107854, JP-A-60-67070, etc., as shown in FIG. 5, a carrier 53 that holds a workpiece W is engaged between a center gear 51 and an internal gear 52, This is a device in which an upper surface plate 54 and a lower surface plate 55 are respectively disposed on the lower side, and both sides of the workpiece are polished while rotating each of them. Conventional carriers for thin-walled workpieces transmit rotation from the center gear and internal gear, and are also constrained to be thinner than the wall thickness of the workpiece. When bearings are subjected to heavy loads, the workpiece holding holes and teeth are loaded, resulting in deformation or breakage due to lack of rigidity. It's gone. Also, due to the construction of the carrier, there was a drawback that large thin-walled workpieces could not be polished.

In addition, Japanese Patent Application Laid-open No. 60-80559 describes a polishing device that enables double-sided polishing of large thin-walled workpieces, but since the upper and lower surface plates are reciprocated,
Each surface plate has a portion where the workpiece does not come into contact with it, and after long-term polishing, each surface plate suffers uneven wear, making it impossible to maintain high-precision polishing. Furthermore, due to a problem with the configuration of the device, it is impossible to remove the polishing allowance, so it cannot be used as a grinding device.

[Problem that the invention attempts to solve]

As mentioned above, the carriers of the prior art have limitations in structure and cannot be used for large workpieces.
Another drawback was that the lack of carrier rigidity made polishing work impossible for thinner workpieces. The purpose of this invention is to apply tension in the direction of the outer circumference of the carrier to increase the rigidity of the carrier itself, making it possible to polish thinner workpieces and highly accurate polishing of large, thin-walled workpieces.

[Means for solving problems]

An upper surface plate 2 and a lower surface plate 3 of the polishing device are arranged within the inner diameter of a pair of tension plates 4 and 5, and
Annular grooves 4' and 5' are formed on the outer periphery of the holding hole 1' for holding the thin-walled workpiece W between the lower surface plates 2 and 3, respectively. A tension ring 6 is loosely fitted into one of the annular grooves 5', and a pressing means 7 provided in the groove part 16 of the annular groove 5' The outer peripheral edge of the carrier 1 is pressed through the tension ring 6, the pair of tension plates 4 and 5 are rotatably supported on a support member 8, and the support member 8 is driven by a swing drive means 9. This is a flat surface polishing device for thin-walled workpieces, which performs rocking motion and rotates the pair of tension plates 4 and 5 by rotation drive means 10 to polish the flat surface of the thin-walled workpiece W.

〔Example〕

1 to 3 show an embodiment of the present invention, in which a workpiece W is held in a holding hole 1' of a carrier 1, and an upper surface plate 2 and a lower surface plate 3 are arranged on the upper and lower sides of the carrier 1, respectively. Set up 11 and 12 are upper surface plate 2 and lower surface plate 3, respectively.
13 and 14 are drive shafts 11 and 12, respectively.
This is a bearing box. An annular groove 4' provided in the tension plate 4 and an annular groove 5' provided in the tension plate 5 are made to face each other, and the carrier 1 is narrowly attached between the tension plates 4 and 5 with a plurality of bolts 15. . In the annular groove 5' of the tension plate 5,
A plurality of adjustment bolts 7 are provided in the groove 16 of the annular groove 5 as means for loosely fitting the tension ring 6 and pressing the tension ring 6 against the carrier 1. 17 and 18 are support rollers rotatably supported by the support member 8, and 19 is a carrier drive shaft 2.
This is a support roller rotatably supported by a shaft portion 20' of 0. The outer peripheral portions and tapered portions of the support rollers 17, 18, 19 are provided with tension plates 4, 5.
The carrier drive shaft 2 rotatably supports the tension plates 4 and 5 by rollingly contacting the outer circumferential edge 5'' formed by the outer circumference and the tapered portion of the carrier drive shaft 2.
A pulley 33 is inserted into the shaft portion 20'' of 0 and transmits rotation to the tension plates 4 and 5 via the belt 21.The pair of tension plates 4 and 5 and the carrier 1 are rotated by the rotation of the driving means 10. and rotates the workpiece W. 22 is a tension roller for the belt 21. The carrier drive shaft 20
A swing shaft 23 rotatably supported by a bearing box 24 fixed to the machine body (not shown) is rotatably supported, and the upper end surface of the swing shaft 23 is fixed to the support member 8. Reference numeral 9 denotes a drive means that transmits drive to the swing shaft 23 via gears 25 and 26 to swing the support member. A gear box 27 of the gears 25, 26 is fixed to the bearing box 24, and
A mounting base 29 to which the driving means 10 is mounted is fixed via a box lid 28. A workpiece support 30 is fixed to a support fixture 31 attached to the machine body (not shown) so as to be at the same height as the upper surface of the lower surface plate 3.

The wall thickness of the carrier 1 that holds the workpiece W is thinner than the thickness T of the workpiece W, and in order to increase the rigidity of the carrier 1 itself, a tensioner is fitted loosely into the annular groove of the tension plate 5. By pressing the ring 6 against the carrier 1 while tightening the plural adjustment screws 7 provided in the groove 16 of the tension plate 5, the R surface 6' of the tension ring 6 elastically deforms the carrier 1, and the tension plate In order to make the tension uniform in the radial direction of the carrier 1 while pushing it into the annular groove 4' of the carrier 1, the plurality of adjusting screws 7 are adjusted respectively to tension the carrier 1. In the case of a carrier with a plurality of holding holes around the center of the carrier, a more uniform tension can be applied by providing an appropriate number of holes of an appropriate size at appropriate locations on the carrier. carrier 1
For example, a strong metal material such as SUS304 is used. It also has the advantage of being much cheaper than conventional carriers.

Next, to explain the operation, by driving the driving means 10,
Rotation is transmitted to the tension plate 5 via the carrier drive shaft 20, pulley 33, and belt 21, and the workpiece W held on the carrier 1 is rotated by the carrier 1.
rotates with. Both sides of the workpiece W are polished while rotating in opposite directions to the upper surface plate 3. Lower surface plate 3
is set at the same height as the workpiece support 30, and the upper surface plate 2 is movable in the axial direction of the drive shaft 11. The support member 8, which rotatably supports the carrier plates 4, 5 via the support rollers 17, 18, 19, is driven by the gears 25, 26 and the swing shaft 2 together with the carrier 1 and the workpiece W.
Perform rocking motion through 3. This swing motion is performed around the axis of the swing shaft 23 at a swing angle α depending on the size of the workpiece W. Due to the swinging motion of the workpiece W, the plane of the workpiece W and the upper surface plate 2 and lower surface plate 3
The relative movement between the workpiece W and the workpiece W becomes even larger, increasing the machining accuracy of the workpiece W.

FIG. 4 is a detailed view of the main part of another embodiment, in which a carrier 44 is attached between a tension plate 41 and a tension plate 42 via a plurality of bolts 43, and the annular shape of the tension plate 41 is Groove 4
1', a seal ring 45 is fitted in place of the tension ring, and a pressure medium is supplied to the annular groove 41' from a check valve 46 attached to the groove 32 of the tension plate 41. The R surface 45' of the seal ring is pressed against the carrier 44, and the carrier 44 is elastically deformed while being pushed into the annular groove 42 of the carrier plate 42, and tension is applied in the radial direction of the carrier 44 to tension it. Further, the tension plate 42 is rotatably supported by a support member 47 via a bearing 48, and the tension plates 41, 42, carrier 44, and workpiece W are rotated by rotation transmission from the belt 49. It goes without saying that the rotational drive of the tension plate is not limited to the drive by the belt in the embodiment, but may also be driven by a chain or gears. The support member 47 is rocked in the same manner as in FIG.

〔effect〕

Year by year, demands for so-called light, thin, and short workpieces are increasing in the high technology industry, and the surface polishing device of this invention is capable of flattening even thinner workpieces than conventional technology. can be made large, making it easy to process large thin-walled workpieces. This is a flat surface polishing device for thin-walled workpieces that efficiently and accurately polishes a wide range of thin-walled workpieces, including metals, non-metals, glass, and ceramics.

[Brief explanation of drawings]

FIG. 1 is a partially sectional front view showing an embodiment of the present invention, FIG. 2 is a partially sectional view showing the main parts of FIG. 1,
3 is a plan view of FIG. 1, FIG. 4 is a partial sectional view showing the main parts of another embodiment, and FIG. 5 is a sectional view showing an outline of the conventional device. 1,44...Carrier, 1'...Holding hole, 2...
... Upper surface plate, 3 ... Lower surface plate, 4, 5 ... Tension plate, 41, 42 ... Tension plate,
4', 5'... annular groove, 5''... outer peripheral edge, 41',
42'...Annular groove, 16, 32...Groove portion, 6...
Tension ring, 45... Seal ring, 7...
...Adjustment screw (pressing means), 46...Check valve (pressing means), 8, 47...Support member,
9, 10... Drive means, 17, 18, 19... Support roller, 48... Bearing, W... Workpiece.

Claims (1)

[Scope of Claim for Utility Model Registration] (1) An upper surface plate and a lower surface plate of a polishing device are arranged within the inner diameter of a pair of tension plates, and a holding hole is provided between the upper and lower surface plates to hold a thin-walled workpiece. A carrier whose wall thickness is thinner than that of the thin-walled work piece is sandwiched between a pair of tension plates each having annular grooves facing each other on the outer peripheral edge thereof, and a tension ring is loosely fitted into one of the annular grooves. Pressing the outer peripheral edge of the carrier via the tension ring by a pressing means provided in the groove of the annular groove, rotatably supporting the pair of tension plates on a support member, and swinging the support member. A flat surface polishing device for a thin-walled workpiece, characterized in that the flat surface of the thin-walled workpiece is polished by causing rocking motion by a drive means and rotating the pair of tension plates by a rotational drive means. (2) Utility model registration claim 1, characterized in that the support member supports a plurality of support rollers, and the support rollers roll and support the outer peripheral edges of the pair of tension plates. A flat surface polishing device for thin-walled workpieces as described in Section 3. (3) The surface polishing device for thin-walled workpieces according to claim 1, wherein the pair of tension plates are pivotally supported by a support member via bearings.