JPS61205757U

JPS61205757U -

Info

Publication number: JPS61205757U
Application number: JP1985089089U
Authority: JP
Priority date: 1985-06-13
Filing date: 1985-06-13
Publication date: 1986-12-25
Also published as: JPH045248Y2

Description

[Brief explanation of the drawing]

第１図は本考案の一実施例を示す一部断面の正
面図、第２図は第１図の要部を示す一部断面図、
第３図は第１図の平面図、第４図は他の実施例の
要部を示す一部断面図、第５図は従来の装置の概
要を示す断面図。１，４４……キヤリア、１′……保持孔、２…
…上定盤、３……下定盤、４，５……テンシヨン
プレート、４１，４２……テンシヨンプレート、
４′，５′……環状溝、５″……外周縁部、４１
′，４２′……環状溝、１６，３２……溝部、６
……テンシヨンリング、４５……シールリング、
７……調整ねじ（押圧する手段）、４６……チエ
ツクバルブ（押圧する手段）、８，４７……支持
部材、９，１０……駆動手段、１７，１８，１９
……支持ローラ、４８……軸受、Ｗ……工作物。 FIG. 1 is a partially sectional front view showing an embodiment of the present invention, FIG. 2 is a partially sectional view showing the main parts of FIG. 1,
3 is a plan view of FIG. 1, FIG. 4 is a partial sectional view showing the main parts of another embodiment, and FIG. 5 is a sectional view showing an outline of the conventional device. 1,44...Carrier, 1'...Holding hole, 2...
... Upper surface plate, 3 ... Lower surface plate, 4, 5 ... Tension plate, 41, 42 ... Tension plate,
4', 5'...Annular groove, 5''...Outer peripheral edge, 41
', 42'...Annular groove, 16, 32...Groove portion, 6
...Tension ring, 45...Seal ring,
7... Adjustment screw (pressing means), 46... Check valve (pressing means), 8, 47... Support member, 9, 10... Drive means, 17, 18, 19
...Support roller, 48...Bearing, W...Workpiece.

Claims

[Scope of Claim for Utility Model Registration] (1) In a flat surface polishing device having a thin-walled carrier provided with a holding hole for a thin-walled workpiece, and an upper surface plate and a lower surface plate disposed above and below the carrier, respectively. , the carrier is sandwiched between a pair of tension plates each having annular grooves facing each other, a tension ring is loosely fitted into one of the annular grooves, and means for pressing the tension ring against the carrier is provided as described above. A driving means is provided in the groove of the annular groove, the pair of tension plates are rotatably supported by a support member, and the drive means is configured to swing the support member, and a drive means is provided to rotate the pair of tension plates. A flat surface polishing device for thin-walled workpieces, which is characterized by: (2) Utility model registration claim 1, characterized in that the support member supports a plurality of support rollers, and the outer peripheral edges of the pair of tension plates are rolled and supported by the support rollers. A flat surface polishing device for thin-walled workpieces as described in Section 3. (3) The surface polishing device for thin-walled workpieces according to claim 1, wherein the pair of tension plates are pivotally supported by a support member via bearings.