JPS63191535A - Thin plate working device - Google Patents

Abstract

PURPOSE:To easily hold a thin plate workpiece free from deformation by uniformly applying the high viscosity oil onto a chuck surface and mounting the workpiece onto the oil film and press-holding the workpiece, in a working device for a magnetic disc substrate, etc. CONSTITUTION:The prescribed quantity of high viscosity oil is supplied into a plurality of chuck grooves 17 on a chuck surface 22 from a feeding pipe 3 and uniformly applied onto the chuck surface 22, and a thin workpiece 6 is fitted onto a work spring-out preventing boss 4 of a chuck 1. Then, a main spindle 2, chuck 1, and the workpiece 6 are revolved integrally by the low speed drive of a main spindle motor, and pressed by a prescribed pressure by the roller 5a of a roller base 9, and then the workpiece 6 is perfectly held by the chuck 1. Then, the prescribed grinding work is carried out by shifting the roller base 9 and revolving the main spindle 2 at a high speed. Therefore, the thin workpiece can be held easily free from deformation, and the woring precision of the workpiece is hot deteriorated even if the workpiece is demounted from a work installation tool after working.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a thin plate processing device, and in particular, it can hold a thin plate workpiece such as a magnetic disk substrate without deforming it, and even if it is removed after processing, The present invention relates to a thin plate processing device suitable for maintaining processing accuracy.

[Conventional technology]

Conventionally, the workpiece mount for holding the workpiece in thin plate processing equipment was manufactured by Precision Machinery Vol. 48, No. 11 (November 1982).
As described on pages 1421 to 1424, the vacuum chuck method, in which the workpiece is forcibly attracted using a vacuum pump, and the three-point attachment method, in which the workpiece is fastened with bolts at three locations, are based on the law. There were two methods: an adhesive method using a two-component castable elastomer.

[Problem that the invention seeks to solve]

Among the above-mentioned conventional techniques, the vacuum chuck method forcibly adsorbs the workpiece, so the flatness of the workpiece is corrected and mounted, so when the workpiece is removed after machining, the flatness is restored. There was a problem that the machining accuracy of the workpiece deteriorated.

In addition, with the three-point mounting method, the appropriate fixing position with the least distortion can be determined by calculation, but grooves for bolting must be cut in positions that do not affect the surface of the workpiece. There was a problem.

Furthermore, the adhesive method is suitable for ultra-precision machining because it allows the workpiece to be elastically fixed to the workpiece fixture, but it has the problem that it takes time to bond, harden, and remove the adhesive.

The present invention improves the problems of the prior art as described above, and can easily hold a thin plate workpiece without deforming it. Providing thin plate processing equipment that does not degrade processing accuracy.
That is the purpose.

[Means for solving problems]

A thin plate processing apparatus according to the present invention for solving the above problems has a structure including a main shaft to which a chuck for holding a workpiece is attached, a main shaft motor for rotationally driving the main shaft, a tool holder for holding a cutting tool, In a thin plate processing apparatus having a moving means for moving the tool holder in the axial direction of the main spindle and in a direction perpendicular to this, a chuck is provided with holes or grooves for oil supply distributed in the chuck surface, and , the chuck is equipped with a locking device for locking the workpiece, and the chuck is provided with oil interposed between the chuck and the chuck oil supply means for supplying oil to the hole or groove. The chuck includes a pressing device capable of pressing a workpiece, which is locked to the chuck by a locking tool, onto the chuck surface.

More specifically, the present invention includes means for uniformly applying a highly viscous fluid to the chuck surface of a chuck associated with a workpiece fixture, and means for pressing the workpiece against the chuck surface.

[Effect]

The chuck oil supply means uniformly applies high viscosity oil to the chuck surface, a workpiece is mounted thereon, and the suppressing means strongly presses the workpiece against the chuck surface. As a result, the workpiece is held in the chuck by the viscosity of the highly viscous oil between the workpiece and the chuck surface, so there is no need to correct the flatness of the workpiece and attach it. Even if it is removed, the machining accuracy of the workpiece will not deteriorate.

〔Example〕

Hereinafter, the present invention will be explained with reference to examples and drawings.

FIG. 1 is a schematic perspective view of a thin plate processing apparatus according to an embodiment of the present invention, and FIG. 2 is the same as that shown in FIG.

FIG. 3 is a longitudinal cross-sectional view showing details of the state in which the workpiece is held.

The outline of this thin plate processing device is as follows: a main spindle 2 with a chuck attached to hold a workpiece 6, a main spindle motor 21 that rotationally drives this main spindle 2, and a tool holder 8 that holds a cutting tool 7 that is a cutting tool. and a tool rest 18, which is a moving means for moving the cutting tool holder 8 in the axial direction of the spindle, that is, in two directions. Feed screw 15. A table 16, which is a moving means for moving the Z transport remoter 14 and the tool holder 8 in a direction perpendicular to the axis of the main shaft, that is, in the X direction. Feed screw 11. The chuck has chuck grooves 17 for oil supply distributed in the chuck surface 22 of the chuck, and a locking tool for locking the workpiece 6. The chuck 1 is equipped with the boss 14 for preventing the workpiece from flying out, and the chuck oil supply pipe 3 is related to the chuck oil supply means for supplying the groove to the chuck groove 17. Chuck oil supply device 2
0 and the chuck 1, the workpiece 6 is held on the chuck 1 by the boss 4 for preventing the workpiece from flying out, and the chuck surface is rotated as the workpiece 6 rotates. This is a thin plate processing apparatus having a pressing device 5 equipped with a roller 5a capable of pressing a sheet 22.

This will be explained in detail below.

In FIG. 1, 19 is a bed, 2 is a spindle (see FIG. 2) on which a chuck 1 (details will be described later) for holding a workpiece 6 is attached, 23 is a headstock that rotatably supports this spindle 2, 21 is a variable speed spindle motor that rotationally drives this spindle 2; 20 is a chuck oil supply device (details will be described later); and these headstocks 23. Main shaft motor 21. The chuck oil supply device 20 is mounted and fixed on the bed 19.

Reference numeral 16 denotes a table placed on the bed 19 so as to be slidable in the X direction, and this table 16 converts the rotational motion of the X transport remoter 12 into linear motion via the feed screw 11. It is designed to move in the X direction. A tool rest 18 that is slidable in the Z direction is placed on this table 16, and this tool rest 18 converts the rotational movement of the Z-compatible motor 14 into linear movement via the feed screw 15. It is configured to convert and move in the Z direction. A cutting tool holder 8 holding a cutting tool 7 is mounted and fixed on the tool rest 18. Further, a pressing device 5 (details will be described later) is placed on the table 16 so as to be able to slide in the Z direction, and the roller stand 9 of this pressing device 5 is connected to the Z transport remoter 1.
The rotary motion of 0 is converted into a linear motion via the feed screw 13 to move in the Z direction.

The pressing device 5 includes a roller 5a (roller made of an elastic material such as rubber) having a rotation axis in the X direction and rotatably mounted on a roller stand 9.

As the details of the chuck 1 are shown in FIG. 2, the chuck grooves 17 for oil supply are formed in a distributed manner on the chuck surface 22, and the oil supply passage 3a communicating with these grooves is located at the axial position. A boss 4 for preventing the workpiece from flying out is attached to the center of the hole. By fitting the workpiece 6 into the boss 4 for preventing the workpiece from flying out, the workpiece 6 can be pushed onto the chuck surface 22 when pressed by the roller 5a.
This is to prevent it from shifting.

Reference numeral 3 denotes a chuck oil supply pipe whose one end is fitted into the other end of the oil supply path 3a, and the other end of this chuck oil supply pipe 3 is located at the axis of the main shaft 2.

It passes through the axis of the main shaft motor 21 and reaches the chuck oil supply device 20 . By driving this chuck oil supply device 20, oil is supplied.

Oil supply pipe for chuck 3. The oil is supplied to the chuck groove 17 through the oil supply path 3aQ, and is uniformly applied to the chuck surface 22.

The operation of the thin plate processing apparatus configured as described above will be explained.

The chuck surface 22 of the chuck 1 is previously self-turned on the machine by a cutting tool 7 to provide a reference surface. To the chuck groove 17 on this chuck surface 22,
A predetermined amount of oil is supplied from the chuck oil supply device 20 via the chuck oil supply pipe 3 to the chuck surface 2.
It is evenly applied to 2. The workpiece 6 is fitted into the workpiece protrusion prevention boss 4 of the chuck 1.

When the thin plate processing device is turned ON, the main shaft motor 21 rotates at a predetermined low speed (for example, 10 rpm), and the main shaft 21 rotates at a predetermined low speed (for example, 10 rpm).
．． Chuck 1. The workpiece 6 rotates as one. , x
Compatible motor12. The Z transport remoter 10 is driven and the table 16. The roller stands 9 move in the X direction and two directions, respectively, and the rollers 5a are pressed against the surface of the workpiece 6 with a predetermined pressure. The workpiece 6 rotates in the direction of the arrow (see Figure 1),
While the roller 5a follows the workpiece 6 and rotates in the direction of the arrow (see FIG. 2), the workpiece 6 is pressed against the chuck surface 22 by the pressure, and this state remains for a predetermined period of time (for example,
1 minute), the workpiece 6 is completely held in the chuck 1. The roller 5a'' is moved backward by the X-axis motor 12 and the Z-axis motor 1o, and the roller 5a is separated from the workpiece 6, thereby completing the holding operation of the workpiece 6.

The main shaft motor 21 rotates at a predetermined high speed. The two-axis feed remoter 14 advances the tool rest 18 to give a predetermined depth of cut, and the X-transport remoter 12 moves the table 16 to the
The workpiece 6 is cut from its inner circumference toward the outside by moving in the direction and applying a predetermined feed amount. When cutting to the outer periphery is completed, the thin plate processing device is turned off. Then, by removing the workpiece 6 from the chuck surface 22, a desired processed product can be obtained.

A specific example will be shown.

A lubricating oil with a kinematic viscosity of 60 cst (at 40'C) is applied to the chuck groove 17 of the aluminum chuck 1, which has an annular chuck groove 17 with a groove width of 5 mm and a groove pitch of 5I1 mm, by a chuck oil supply device 2°. 210mmφ outer diameter, 100Iφ inner diameter, 1mm thickness
．． A 2 m long magnetic substrate was held. Depth of cut 0.01
After performing a predetermined processing using an an, the flatness when removed from the chuck 1 was 2 μm. On the contrary,
The flatness was 5 μm in the case of the conventional vacuum chuck method.

According to the embodiment described above, since the workpiece 6 is held on the chuck 1 using the viscosity of oil, the workpiece 6
can be easily held without correcting its flatness, and even after the workpiece 6 is removed from the chuck 1 after processing, the machining accuracy of the workpiece is not only maintained, but also This eliminates the need for time for adhesion, curing, and removal, and it can be easily removed from the chuck 1 after processing, which has the effect of improving productivity.

In this embodiment, a roller 5a is used which can press the workpiece 6, which is locked with the chuck 1 with oil interposed therebetween, against the chuck surface 22 while following the rotation of the workpiece 6. However, instead of this pressing device 5, a pressing device equipped with a flat plate having an outer diameter larger than the outer diameter of the workpiece 6 is provided, and an oil is connected between the pressing device 5 and the chuck 1. The workpiece 6 may be held in the chuck 1 by simultaneously pressing the entire surface of the stopped workpiece 6 with the flat plate.

Further, in this embodiment, the chuck groove 17 for supplying oil is formed in the chuck surface 22, but the same effect can be obtained even if holes are formed in a distributed manner instead of grooves. It is.

〔Effect of the invention〕

As explained in detail above, according to the present invention, a thin plate workpiece can be easily held without deformation, and even if the workpiece is removed from the workpiece fixture after processing, the processing accuracy of the workpiece is maintained. A thin plate processing device that does not deteriorate can be provided.

[Brief explanation of the drawing]

FIG. 1 is a schematic perspective view of a thin plate processing apparatus according to an embodiment of the present invention, and FIG. 2 is a longitudinal cross-sectional view showing details of the state in which a workpiece is held in FIG. 1. DESCRIPTION OF SYMBOLS 1... Chuck, 2... Main spindle, 4... Boss for preventing workpiece from popping out, 5... Pressing device, 6... Workpiece, 7...
...Bite, 8...Bite holder, 16...Table, 18...Turret, 20...Chuck oil supply device, 21...Spindle motor.

Claims (1)

[Claims] 1. A spindle with a chuck attached to hold the workpiece, a spindle motor that rotationally drives this spindle, a tool holder that holds a cutting tool, and moves this tool holder in the axial direction of the spindle and in a direction perpendicular to this. In the thin plate processing apparatus, the chuck is provided with holes or grooves distributed in the chuck surface for oil supply, and is equipped with a locking tool for locking the workpiece. ,
A chuck oil supply means for supplying oil to the hole or groove, and a workpiece that is locked to the chuck by the locking tool with oil interposed between the chuck and the chuck surface. 1. A thin plate processing device characterized by having a pressing device capable of pressing.