JPH0452196Y2 - - Google Patents
Info
- Publication number
- JPH0452196Y2 JPH0452196Y2 JP1986125397U JP12539786U JPH0452196Y2 JP H0452196 Y2 JPH0452196 Y2 JP H0452196Y2 JP 1986125397 U JP1986125397 U JP 1986125397U JP 12539786 U JP12539786 U JP 12539786U JP H0452196 Y2 JPH0452196 Y2 JP H0452196Y2
- Authority
- JP
- Japan
- Prior art keywords
- green sheet
- hard
- head
- suction
- head body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986125397U JPH0452196Y2 (en, 2012) | 1986-08-15 | 1986-08-15 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986125397U JPH0452196Y2 (en, 2012) | 1986-08-15 | 1986-08-15 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6332849U JPS6332849U (en, 2012) | 1988-03-03 |
JPH0452196Y2 true JPH0452196Y2 (en, 2012) | 1992-12-08 |
Family
ID=31018266
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1986125397U Expired JPH0452196Y2 (en, 2012) | 1986-08-15 | 1986-08-15 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0452196Y2 (en, 2012) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI439351B (zh) * | 2008-09-29 | 2014-06-01 | Nitto Denko Corp | Adsorption tablets |
JP6563277B2 (ja) * | 2015-08-26 | 2019-08-21 | 株式会社カテックス | 吸着装置及び搬送方法 |
EP3427907A1 (en) * | 2016-03-08 | 2019-01-16 | Nano-Tem Co., Ltd. | Conveyance pad, and conveyance device and conveyance method using same |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51101474U (en, 2012) * | 1975-02-10 | 1976-08-14 | ||
JPS5313045A (en) * | 1976-07-22 | 1978-02-06 | Ishikawajima Harima Heavy Ind Co Ltd | Air bearing and vacuum adsorption device |
-
1986
- 1986-08-15 JP JP1986125397U patent/JPH0452196Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS6332849U (en, 2012) | 1988-03-03 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPH0452196Y2 (en, 2012) | ||
JP4181809B2 (ja) | 焼成用セッター | |
JPS61136838A (ja) | 積層した板材の分離機構 | |
JP2585298Y2 (ja) | チップボンディング装置におけるワーク吸着部 | |
JPH1142583A (ja) | 多孔板吸着装置 | |
JP4254749B2 (ja) | 被運搬体吸着保持用当接体及び吸着保持装置 | |
JPH0338191Y2 (en, 2012) | ||
CN212859225U (zh) | 一种陶瓷面板真空吸腔 | |
JPS6050910A (ja) | 積層コンデンサの製造方法 | |
JPS61155135A (ja) | 板状体の移載方法 | |
TW593966B (en) | Device of stacking and bonding cross channel structural body and method thereof | |
JP3104784B2 (ja) | 真空吸着装置における2枚同時吊り上げ防止装置 | |
JPH0253948U (en, 2012) | ||
JPS63126347U (en, 2012) | ||
JPS6315757Y2 (en, 2012) | ||
JP2583355B2 (ja) | 半導体製造装置のリードフレーム供給方法 | |
JPS6027610B2 (ja) | 可撓性板状体の分離方法 | |
JPS629066Y2 (en, 2012) | ||
JP3561678B2 (ja) | 板材用スペーサ | |
JPS6341049U (en, 2012) | ||
JPH058280Y2 (en, 2012) | ||
JPS6238776Y2 (en, 2012) | ||
JPH0798587B2 (ja) | 真空吸着シリンダ | |
JPH0434015Y2 (en, 2012) | ||
JPH0881072A (ja) | 箔 束 |