JPH0451814B2 - - Google Patents
Info
- Publication number
- JPH0451814B2 JPH0451814B2 JP62095859A JP9585987A JPH0451814B2 JP H0451814 B2 JPH0451814 B2 JP H0451814B2 JP 62095859 A JP62095859 A JP 62095859A JP 9585987 A JP9585987 A JP 9585987A JP H0451814 B2 JPH0451814 B2 JP H0451814B2
- Authority
- JP
- Japan
- Prior art keywords
- suction
- ventilation
- mat
- sheet
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000009423 ventilation Methods 0.000 claims description 43
- 239000000463 material Substances 0.000 claims description 21
- 238000001179 sorption measurement Methods 0.000 claims description 4
- 230000000149 penetrating effect Effects 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 17
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 8
- 230000000694 effects Effects 0.000 description 4
- 229920003002 synthetic resin Polymers 0.000 description 4
- 239000000057 synthetic resin Substances 0.000 description 4
- 229920005989 resin Polymers 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 239000007779 soft material Substances 0.000 description 2
- 239000002344 surface layer Substances 0.000 description 2
- 238000009966 trimming Methods 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000037303 wrinkles Effects 0.000 description 1
Landscapes
- Holders For Sensitive Materials And Originals (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62095859A JPS63261249A (ja) | 1987-04-18 | 1987-04-18 | シ−ト状物の真空吸着装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62095859A JPS63261249A (ja) | 1987-04-18 | 1987-04-18 | シ−ト状物の真空吸着装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63261249A JPS63261249A (ja) | 1988-10-27 |
| JPH0451814B2 true JPH0451814B2 (ko) | 1992-08-20 |
Family
ID=14149088
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62095859A Granted JPS63261249A (ja) | 1987-04-18 | 1987-04-18 | シ−ト状物の真空吸着装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63261249A (ko) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2552197B2 (ja) * | 1990-08-27 | 1996-11-06 | 株式会社オーク製作所 | 自動露光装置および投入ステージ |
| TW484037B (en) * | 1999-09-01 | 2002-04-21 | Sanei Giken Co Ltd | Substrate supporting table of exposure system |
| US6889967B2 (en) | 2002-09-27 | 2005-05-10 | Gerber Technology, Inc. | Perforated vacuum hold down surface |
| WO2013121796A1 (ja) * | 2012-02-17 | 2013-08-22 | 日東電工株式会社 | 吸着用多孔質シートおよび吸着用多孔質シートに用いる交換用表面層 |
| TWI613449B (zh) * | 2016-12-30 | 2018-02-01 | 致茂電子股份有限公司 | 吸附式測試裝置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3762816A (en) * | 1972-03-31 | 1973-10-02 | Western Blue Print Co | Photoreproduction apparatus with auxiliary film holder |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56145044U (ko) * | 1980-03-31 | 1981-11-02 |
-
1987
- 1987-04-18 JP JP62095859A patent/JPS63261249A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3762816A (en) * | 1972-03-31 | 1973-10-02 | Western Blue Print Co | Photoreproduction apparatus with auxiliary film holder |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63261249A (ja) | 1988-10-27 |
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