JPH0451472Y2 - - Google Patents

Info

Publication number
JPH0451472Y2
JPH0451472Y2 JP1986122017U JP12201786U JPH0451472Y2 JP H0451472 Y2 JPH0451472 Y2 JP H0451472Y2 JP 1986122017 U JP1986122017 U JP 1986122017U JP 12201786 U JP12201786 U JP 12201786U JP H0451472 Y2 JPH0451472 Y2 JP H0451472Y2
Authority
JP
Japan
Prior art keywords
growth
source
chamber
molecular beam
load lock
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1986122017U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6329926U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986122017U priority Critical patent/JPH0451472Y2/ja
Publication of JPS6329926U publication Critical patent/JPS6329926U/ja
Application granted granted Critical
Publication of JPH0451472Y2 publication Critical patent/JPH0451472Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP1986122017U 1986-08-08 1986-08-08 Expired JPH0451472Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986122017U JPH0451472Y2 (enrdf_load_stackoverflow) 1986-08-08 1986-08-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986122017U JPH0451472Y2 (enrdf_load_stackoverflow) 1986-08-08 1986-08-08

Publications (2)

Publication Number Publication Date
JPS6329926U JPS6329926U (enrdf_load_stackoverflow) 1988-02-27
JPH0451472Y2 true JPH0451472Y2 (enrdf_load_stackoverflow) 1992-12-03

Family

ID=31011822

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986122017U Expired JPH0451472Y2 (enrdf_load_stackoverflow) 1986-08-08 1986-08-08

Country Status (1)

Country Link
JP (1) JPH0451472Y2 (enrdf_load_stackoverflow)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58162029A (ja) * 1982-03-23 1983-09-26 Hoxan Corp 多結晶シリコンウエハの製造方法
JPS5833825A (ja) * 1981-08-22 1983-02-28 Nippon Telegr & Teleph Corp <Ntt> 分子線エピタキシヤル成長装置

Also Published As

Publication number Publication date
JPS6329926U (enrdf_load_stackoverflow) 1988-02-27

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