JPH0449926B2 - - Google Patents
Info
- Publication number
- JPH0449926B2 JPH0449926B2 JP27414884A JP27414884A JPH0449926B2 JP H0449926 B2 JPH0449926 B2 JP H0449926B2 JP 27414884 A JP27414884 A JP 27414884A JP 27414884 A JP27414884 A JP 27414884A JP H0449926 B2 JPH0449926 B2 JP H0449926B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- reflecting mirror
- piezoelectric element
- electrode
- deflection device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 12
- 230000003287 optical effect Effects 0.000 claims description 8
- 238000006073 displacement reaction Methods 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 9
- 238000000034 method Methods 0.000 description 7
- 230000003595 spectral effect Effects 0.000 description 5
- 238000001228 spectrum Methods 0.000 description 5
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 238000005070 sampling Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000006059 cover glass Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Landscapes
- Mechanical Optical Scanning Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27414884A JPS61153614A (ja) | 1984-12-27 | 1984-12-27 | 定在波を利用した光変向装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27414884A JPS61153614A (ja) | 1984-12-27 | 1984-12-27 | 定在波を利用した光変向装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61153614A JPS61153614A (ja) | 1986-07-12 |
| JPH0449926B2 true JPH0449926B2 (enrdf_load_stackoverflow) | 1992-08-12 |
Family
ID=17537690
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27414884A Granted JPS61153614A (ja) | 1984-12-27 | 1984-12-27 | 定在波を利用した光変向装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61153614A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5327813B2 (ja) * | 2010-07-26 | 2013-10-30 | 独立行政法人産業技術総合研究所 | 光走査装置 |
| JP7477159B2 (ja) * | 2020-08-12 | 2024-05-01 | 北陽電機株式会社 | 光偏向装置、光走査装置及び光走査式測距装置 |
-
1984
- 1984-12-27 JP JP27414884A patent/JPS61153614A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61153614A (ja) | 1986-07-12 |
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