JPH0449908B2 - - Google Patents

Info

Publication number
JPH0449908B2
JPH0449908B2 JP11856085A JP11856085A JPH0449908B2 JP H0449908 B2 JPH0449908 B2 JP H0449908B2 JP 11856085 A JP11856085 A JP 11856085A JP 11856085 A JP11856085 A JP 11856085A JP H0449908 B2 JPH0449908 B2 JP H0449908B2
Authority
JP
Japan
Prior art keywords
layer
humidity
sensitive film
moisture
upper electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP11856085A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61277046A (ja
Inventor
Kenichi Yamane
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Chino Corp
Original Assignee
Chino Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chino Corp filed Critical Chino Corp
Priority to JP11856085A priority Critical patent/JPS61277046A/ja
Publication of JPS61277046A publication Critical patent/JPS61277046A/ja
Publication of JPH0449908B2 publication Critical patent/JPH0449908B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
JP11856085A 1985-05-31 1985-05-31 湿度素子 Granted JPS61277046A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11856085A JPS61277046A (ja) 1985-05-31 1985-05-31 湿度素子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11856085A JPS61277046A (ja) 1985-05-31 1985-05-31 湿度素子

Publications (2)

Publication Number Publication Date
JPS61277046A JPS61277046A (ja) 1986-12-08
JPH0449908B2 true JPH0449908B2 (enEXAMPLES) 1992-08-12

Family

ID=14739613

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11856085A Granted JPS61277046A (ja) 1985-05-31 1985-05-31 湿度素子

Country Status (1)

Country Link
JP (1) JPS61277046A (enEXAMPLES)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI98861C (fi) * 1994-01-18 1997-08-25 Vaisala Oy Menetelmä mikrohuokoisen, kaasua läpäisevän elektrodin valmistamiseksisekä mikrohuokoinen kaasua läpäisevä elektrodi
JP5385657B2 (ja) * 2009-03-27 2014-01-08 株式会社堀場製作所 ガスセンサ

Also Published As

Publication number Publication date
JPS61277046A (ja) 1986-12-08

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