JPH0449808U - - Google Patents

Info

Publication number
JPH0449808U
JPH0449808U JP9251590U JP9251590U JPH0449808U JP H0449808 U JPH0449808 U JP H0449808U JP 9251590 U JP9251590 U JP 9251590U JP 9251590 U JP9251590 U JP 9251590U JP H0449808 U JPH0449808 U JP H0449808U
Authority
JP
Japan
Prior art keywords
visible light
film thickness
substrate
forming
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9251590U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9251590U priority Critical patent/JPH0449808U/ja
Publication of JPH0449808U publication Critical patent/JPH0449808U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP9251590U 1990-09-03 1990-09-03 Pending JPH0449808U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9251590U JPH0449808U (enExample) 1990-09-03 1990-09-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9251590U JPH0449808U (enExample) 1990-09-03 1990-09-03

Publications (1)

Publication Number Publication Date
JPH0449808U true JPH0449808U (enExample) 1992-04-27

Family

ID=31829040

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9251590U Pending JPH0449808U (enExample) 1990-09-03 1990-09-03

Country Status (1)

Country Link
JP (1) JPH0449808U (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008533452A (ja) * 2005-03-09 2008-08-21 ライボルト オプティクス ゲゼルシャフト ミット ベシュレンクテル ハフツング 積層プロセスを光学的にモニタリングするための測定装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008533452A (ja) * 2005-03-09 2008-08-21 ライボルト オプティクス ゲゼルシャフト ミット ベシュレンクテル ハフツング 積層プロセスを光学的にモニタリングするための測定装置

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