JPH0448621U - - Google Patents
Info
- Publication number
- JPH0448621U JPH0448621U JP9172490U JP9172490U JPH0448621U JP H0448621 U JPH0448621 U JP H0448621U JP 9172490 U JP9172490 U JP 9172490U JP 9172490 U JP9172490 U JP 9172490U JP H0448621 U JPH0448621 U JP H0448621U
- Authority
- JP
- Japan
- Prior art keywords
- liquid
- substrate
- liquid draining
- draining chamber
- conveying means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 claims description 12
- 239000000758 substrate Substances 0.000 claims description 9
- 238000010586 diagram Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Weting (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990091724U JPH083001Y2 (ja) | 1990-08-31 | 1990-08-31 | 基板の液切り装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1990091724U JPH083001Y2 (ja) | 1990-08-31 | 1990-08-31 | 基板の液切り装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0448621U true JPH0448621U (enrdf_load_stackoverflow) | 1992-04-24 |
JPH083001Y2 JPH083001Y2 (ja) | 1996-01-29 |
Family
ID=31827607
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1990091724U Expired - Lifetime JPH083001Y2 (ja) | 1990-08-31 | 1990-08-31 | 基板の液切り装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH083001Y2 (enrdf_load_stackoverflow) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005251544A (ja) * | 2004-03-04 | 2005-09-15 | Toray Ind Inc | パターンの形成方法、パターンの形成装置およびプラズマディスプレイ用部材の製造方法 |
WO2019097943A1 (ja) * | 2017-11-16 | 2019-05-23 | 日本電気硝子株式会社 | ガラス板の製造方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6341630A (ja) * | 1986-08-06 | 1988-02-22 | Toyota Motor Corp | 内燃機関の燃料噴射量制御方法 |
JPH0252436U (enrdf_load_stackoverflow) * | 1988-10-05 | 1990-04-16 |
-
1990
- 1990-08-31 JP JP1990091724U patent/JPH083001Y2/ja not_active Expired - Lifetime
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6341630A (ja) * | 1986-08-06 | 1988-02-22 | Toyota Motor Corp | 内燃機関の燃料噴射量制御方法 |
JPH0252436U (enrdf_load_stackoverflow) * | 1988-10-05 | 1990-04-16 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005251544A (ja) * | 2004-03-04 | 2005-09-15 | Toray Ind Inc | パターンの形成方法、パターンの形成装置およびプラズマディスプレイ用部材の製造方法 |
WO2019097943A1 (ja) * | 2017-11-16 | 2019-05-23 | 日本電気硝子株式会社 | ガラス板の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JPH083001Y2 (ja) | 1996-01-29 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
EXPY | Cancellation because of completion of term |