JPH0448621U - - Google Patents
Info
- Publication number
- JPH0448621U JPH0448621U JP9172490U JP9172490U JPH0448621U JP H0448621 U JPH0448621 U JP H0448621U JP 9172490 U JP9172490 U JP 9172490U JP 9172490 U JP9172490 U JP 9172490U JP H0448621 U JPH0448621 U JP H0448621U
- Authority
- JP
- Japan
- Prior art keywords
- liquid
- substrate
- liquid draining
- draining chamber
- conveying means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 claims description 12
- 239000000758 substrate Substances 0.000 claims description 9
- 238000010586 diagram Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Description
図面は本考案の実施例を示し、第１図は本考案
にかかる液切り装置を含んでなる水平搬送式エツ
チングマシンの概念図、第２図は別実施例の要部
取り出し概念図である。
１……搬送手段、４……液切りチヤンバー、５
……チヤンバーの前側壁、６……基板搬入口、７
……チヤンバーの後側壁、８……基板搬出口、９
……エアナイフ、１０……強制排気手段、１５…
…排気口、１７……散水管、Ｗ……被処理基板。
The drawings show an embodiment of the present invention, and FIG. 1 is a conceptual diagram of a horizontal conveyance type etching machine including a liquid draining device according to the present invention, and FIG. 2 is a conceptual diagram of a main part of another embodiment. 1...Transporting means, 4...Liquid draining chamber, 5
...Front wall of the chamber, 6...Substrate loading port, 7
... Rear wall of chamber, 8 ... Board exit, 9
...Air knife, 10...Forced exhaust means, 15...
...Exhaust port, 17...Water pipe, W...Substrate to be processed.
Claims (1)
成するとともに、液切りチヤンバーの後側壁に基
板搬出口を形成し、液切りチヤンバー内に配置し
た搬送手段で被処理基板を搬送可能に構成し、液
切りチヤンバー内で搬送手段の少なくとも一面側
にエアナイフを搬送手段に近接させて配置し、液
切りチヤンバー内の搬送手段下方に強制排気手段
と連通した排気口を設けてなる基板の液切り装置
において、 液切りチヤンバーの少なくとも基板搬入口及び
基板搬出口を形成している前後側壁の内壁面に液
体を供給し、この液体を壁面に沿つて流下させる
ように構成したことを特徴とする基板の液切り装
置。[Claim for Utility Model Registration] A substrate loading port is formed on the front wall of the liquid draining chamber, and a substrate loading port is formed in the rear wall of the liquid draining chamber, and the substrate to be processed is transported by a conveying means disposed inside the liquid draining chamber. an air knife is disposed close to the conveying means on at least one side of the conveying means in the liquid draining chamber, and an exhaust port communicating with the forced exhaust means is provided below the conveying means in the liquid draining chamber. In the substrate liquid draining device, the liquid is supplied to the inner wall surface of the front and rear side walls forming at least the substrate loading port and the substrate loading port of the liquid draining chamber, and the liquid is configured to flow down along the wall surface. A device for draining liquid from a substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990091724U JPH083001Y2 (en) | 1990-08-31 | 1990-08-31 | Substrate drainer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990091724U JPH083001Y2 (en) | 1990-08-31 | 1990-08-31 | Substrate drainer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0448621U true JPH0448621U (en) | 1992-04-24 |
| JPH083001Y2 JPH083001Y2 (en) | 1996-01-29 |
Family
ID=31827607
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990091724U Expired - Lifetime JPH083001Y2 (en) | 1990-08-31 | 1990-08-31 | Substrate drainer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH083001Y2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005251544A (en) * | 2004-03-04 | 2005-09-15 | Toray Ind Inc | Pattern forming method, pattern forming device, and manufacturing method of plasma display component |
| WO2019097943A1 (en) * | 2017-11-16 | 2019-05-23 | 日本電気硝子株式会社 | Method for manufacturing glass plate |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6341630A (en) * | 1986-08-06 | 1988-02-22 | Toyota Motor Corp | Fuel injection quantity controlling method for internal combustion engine |
| JPH0252436U (en) * | 1988-10-05 | 1990-04-16 |
-
1990
- 1990-08-31 JP JP1990091724U patent/JPH083001Y2/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6341630A (en) * | 1986-08-06 | 1988-02-22 | Toyota Motor Corp | Fuel injection quantity controlling method for internal combustion engine |
| JPH0252436U (en) * | 1988-10-05 | 1990-04-16 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005251544A (en) * | 2004-03-04 | 2005-09-15 | Toray Ind Inc | Pattern forming method, pattern forming device, and manufacturing method of plasma display component |
| JP4691887B2 (en) * | 2004-03-04 | 2011-06-01 | パナソニック株式会社 | Pattern forming method, pattern forming apparatus, and method for manufacturing member for plasma display |
| WO2019097943A1 (en) * | 2017-11-16 | 2019-05-23 | 日本電気硝子株式会社 | Method for manufacturing glass plate |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH083001Y2 (en) | 1996-01-29 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| EXPY | Cancellation because of completion of term |