JPH0448259U - - Google Patents
Info
- Publication number
- JPH0448259U JPH0448259U JP9112790U JP9112790U JPH0448259U JP H0448259 U JPH0448259 U JP H0448259U JP 9112790 U JP9112790 U JP 9112790U JP 9112790 U JP9112790 U JP 9112790U JP H0448259 U JPH0448259 U JP H0448259U
- Authority
- JP
- Japan
- Prior art keywords
- vapor deposition
- electron beam
- outlet
- inlet
- vacuum chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007740 vapor deposition Methods 0.000 claims description 5
- 238000010894 electron beam technology Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims 2
- 238000005566 electron beam evaporation Methods 0.000 claims 1
- 238000001704 evaporation Methods 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Crucibles And Fluidized-Bed Furnaces (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9112790U JPH0448259U ( ) | 1990-08-29 | 1990-08-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9112790U JPH0448259U ( ) | 1990-08-29 | 1990-08-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0448259U true JPH0448259U ( ) | 1992-04-23 |
Family
ID=31826461
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9112790U Pending JPH0448259U ( ) | 1990-08-29 | 1990-08-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0448259U ( ) |
-
1990
- 1990-08-29 JP JP9112790U patent/JPH0448259U/ja active Pending