JPS61177439U - - Google Patents

Info

Publication number
JPS61177439U
JPS61177439U JP6128085U JP6128085U JPS61177439U JP S61177439 U JPS61177439 U JP S61177439U JP 6128085 U JP6128085 U JP 6128085U JP 6128085 U JP6128085 U JP 6128085U JP S61177439 U JPS61177439 U JP S61177439U
Authority
JP
Japan
Prior art keywords
crucible
thin film
vapor
film forming
spouting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6128085U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6128085U priority Critical patent/JPS61177439U/ja
Publication of JPS61177439U publication Critical patent/JPS61177439U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP6128085U 1985-04-24 1985-04-24 Pending JPS61177439U ( )

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6128085U JPS61177439U ( ) 1985-04-24 1985-04-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6128085U JPS61177439U ( ) 1985-04-24 1985-04-24

Publications (1)

Publication Number Publication Date
JPS61177439U true JPS61177439U ( ) 1986-11-05

Family

ID=30589411

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6128085U Pending JPS61177439U ( ) 1985-04-24 1985-04-24

Country Status (1)

Country Link
JP (1) JPS61177439U ( )

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5752904U ( ) * 1980-09-12 1982-03-27

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5752904U ( ) * 1980-09-12 1982-03-27

Similar Documents

Publication Publication Date Title
JPS61177439U ( )
JPS6251170U ( )
JPH0214357U ( )
JPH0165851U ( )
JPS61133558U ( )
JPH0325239U ( )
JPH0363569U ( )
JPS6379632U ( )
JPH0448259U ( )
JPH0389269U ( )
JPS6297166U ( )
JPH036459U ( )
JPS62168487U ( )
JPS62199690U ( )
JPS6339162U ( )
JPS6283866U ( )
JPH0392766U ( )
JPH0437257U ( )
JPS6155063U ( )
JPS6379049U ( )
JPS62134235U ( )
JPH0294262U ( )
JPH0375175U ( )
JPS62141061U ( )
JPS62168235U ( )