JPH0447959Y2 - - Google Patents

Info

Publication number
JPH0447959Y2
JPH0447959Y2 JP1985199406U JP19940685U JPH0447959Y2 JP H0447959 Y2 JPH0447959 Y2 JP H0447959Y2 JP 1985199406 U JP1985199406 U JP 1985199406U JP 19940685 U JP19940685 U JP 19940685U JP H0447959 Y2 JPH0447959 Y2 JP H0447959Y2
Authority
JP
Japan
Prior art keywords
ring
vacuum
high frequency
elastic body
microwave
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985199406U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62109449U (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985199406U priority Critical patent/JPH0447959Y2/ja
Publication of JPS62109449U publication Critical patent/JPS62109449U/ja
Application granted granted Critical
Publication of JPH0447959Y2 publication Critical patent/JPH0447959Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)
  • Drying Of Semiconductors (AREA)
JP1985199406U 1985-12-27 1985-12-27 Expired JPH0447959Y2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985199406U JPH0447959Y2 (en:Method) 1985-12-27 1985-12-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985199406U JPH0447959Y2 (en:Method) 1985-12-27 1985-12-27

Publications (2)

Publication Number Publication Date
JPS62109449U JPS62109449U (en:Method) 1987-07-13
JPH0447959Y2 true JPH0447959Y2 (en:Method) 1992-11-12

Family

ID=31161000

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985199406U Expired JPH0447959Y2 (en:Method) 1985-12-27 1985-12-27

Country Status (1)

Country Link
JP (1) JPH0447959Y2 (en:Method)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58199529A (ja) * 1982-05-17 1983-11-19 Hitachi Ltd プラズマエツチング装置
US4547247A (en) * 1984-03-09 1985-10-15 Tegal Corporation Plasma reactor chuck assembly

Also Published As

Publication number Publication date
JPS62109449U (en:Method) 1987-07-13

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