JPH0447954Y2 - - Google Patents

Info

Publication number
JPH0447954Y2
JPH0447954Y2 JP1983191394U JP19139483U JPH0447954Y2 JP H0447954 Y2 JPH0447954 Y2 JP H0447954Y2 JP 1983191394 U JP1983191394 U JP 1983191394U JP 19139483 U JP19139483 U JP 19139483U JP H0447954 Y2 JPH0447954 Y2 JP H0447954Y2
Authority
JP
Japan
Prior art keywords
wafer
gripping piece
base
movable gripping
wafer holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1983191394U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6099531U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19139483U priority Critical patent/JPS6099531U/ja
Publication of JPS6099531U publication Critical patent/JPS6099531U/ja
Application granted granted Critical
Publication of JPH0447954Y2 publication Critical patent/JPH0447954Y2/ja
Granted legal-status Critical Current

Links

JP19139483U 1983-12-12 1983-12-12 ウエハーホルダ Granted JPS6099531U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19139483U JPS6099531U (ja) 1983-12-12 1983-12-12 ウエハーホルダ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19139483U JPS6099531U (ja) 1983-12-12 1983-12-12 ウエハーホルダ

Publications (2)

Publication Number Publication Date
JPS6099531U JPS6099531U (ja) 1985-07-06
JPH0447954Y2 true JPH0447954Y2 (enExample) 1992-11-12

Family

ID=30412158

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19139483U Granted JPS6099531U (ja) 1983-12-12 1983-12-12 ウエハーホルダ

Country Status (1)

Country Link
JP (1) JPS6099531U (enExample)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5678244U (enExample) * 1979-11-07 1981-06-25

Also Published As

Publication number Publication date
JPS6099531U (ja) 1985-07-06

Similar Documents

Publication Publication Date Title
CN112309937B (zh) 立式批处理炉组件
TWI894159B (zh) 立式批次處理爐組件
EP2626319B1 (en) Carrier and carrying system
JPH019944Y2 (enExample)
KR970008466A (ko) 반도체 웨이퍼의 수납. 인출장치 및 이것에 이용되는 반도체 웨이퍼의 운반용기
JP4603209B2 (ja) ウエハ搬送用の位置決め固定装置
JP7772509B2 (ja) Ｆｏｕｐハンドラーでの高速ｆｏｕｐ交換
JP2005327927A (ja) 半導体ウエーハの搬送容器及び搬送方法
JPH10139157A (ja) 基板搬送装置
FR2599719A1 (fr) Mallette porte-cigares
JPH09298227A (ja) ウエハカセット搬送システム
JPH0632684Y2 (ja) ロボットを用いた搬送装置
JP2947576B2 (ja) 収納治具の挟持構造および挟持方法
JP2001035911A (ja) クリーンボックス内ウエハ固定装置
JPH06326182A (ja) 円盤状物品用キャリア及びこれを用いた自動搬送装置
CA3072824C (en) Railcar bridge plate kit retainer
JPS5844102Y2 (ja) 物品移載装置
JPH0649552Y2 (ja) 転がり搬送物の施回移載装置
JPH0671040B2 (ja) ウェーハカセット搬送機構
JPH08290737A (ja) 貨物車等における長尺物荷役装置
US4927313A (en) Nuclear fuel pellet sintering boat unloading apparatus and method
JP3213363B2 (ja) トラック荷台の側板の開閉補助装置
JP2847759B2 (ja) 半導体基板収納容器
JP2000071855A (ja) コンテナ着脱式運搬車
JPH10194454A (ja) カセット搬送台車