JPH0447382B2 - - Google Patents
Info
- Publication number
- JPH0447382B2 JPH0447382B2 JP61142167A JP14216786A JPH0447382B2 JP H0447382 B2 JPH0447382 B2 JP H0447382B2 JP 61142167 A JP61142167 A JP 61142167A JP 14216786 A JP14216786 A JP 14216786A JP H0447382 B2 JPH0447382 B2 JP H0447382B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- fluorocarbon
- recording medium
- recording
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000010408 film Substances 0.000 claims description 35
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 claims description 32
- 239000000758 substrate Substances 0.000 claims description 24
- 230000003287 optical effect Effects 0.000 claims description 20
- 239000007789 gas Substances 0.000 claims description 19
- 238000009832 plasma treatment Methods 0.000 claims description 11
- 239000010409 thin film Substances 0.000 claims description 11
- 229910052731 fluorine Inorganic materials 0.000 claims description 10
- 239000011737 fluorine Substances 0.000 claims description 9
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 8
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 claims description 8
- 229910052799 carbon Inorganic materials 0.000 claims description 8
- 239000011261 inert gas Substances 0.000 claims description 6
- 239000011669 selenium Substances 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- 238000005553 drilling Methods 0.000 claims description 4
- 229910052711 selenium Inorganic materials 0.000 claims description 4
- 238000005546 reactive sputtering Methods 0.000 claims description 2
- LMDVZDMBPZVAIV-UHFFFAOYSA-N selenium hexafluoride Chemical compound F[Se](F)(F)(F)(F)F LMDVZDMBPZVAIV-UHFFFAOYSA-N 0.000 claims description 2
- 230000007547 defect Effects 0.000 claims 1
- 239000013077 target material Substances 0.000 claims 1
- 239000010410 layer Substances 0.000 description 61
- 230000035945 sensitivity Effects 0.000 description 12
- 239000000463 material Substances 0.000 description 11
- 238000000034 method Methods 0.000 description 8
- 125000001153 fluoro group Chemical group F* 0.000 description 7
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 6
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 6
- 239000004810 polytetrafluoroethylene Substances 0.000 description 6
- 238000004544 sputter deposition Methods 0.000 description 6
- 125000004432 carbon atom Chemical group C* 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 230000001965 increasing effect Effects 0.000 description 5
- 229920005989 resin Polymers 0.000 description 5
- 239000011347 resin Substances 0.000 description 5
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- -1 polytetrafluoroethylene Polymers 0.000 description 4
- 239000002344 surface layer Substances 0.000 description 4
- 238000004132 cross linking Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 239000000178 monomer Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 229920006026 co-polymeric resin Polymers 0.000 description 2
- 229920001577 copolymer Polymers 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- UYTPUPDQBNUYGX-UHFFFAOYSA-N guanine Chemical compound O=C1NC(N)=NC2=C1N=CN2 UYTPUPDQBNUYGX-UHFFFAOYSA-N 0.000 description 2
- ZQBFAOFFOQMSGJ-UHFFFAOYSA-N hexafluorobenzene Chemical compound FC1=C(F)C(F)=C(F)C(F)=C1F ZQBFAOFFOQMSGJ-UHFFFAOYSA-N 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 238000004904 shortening Methods 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- PEVRKKOYEFPFMN-UHFFFAOYSA-N 1,1,2,3,3,3-hexafluoroprop-1-ene;1,1,2,2-tetrafluoroethene Chemical group FC(F)=C(F)F.FC(F)=C(F)C(F)(F)F PEVRKKOYEFPFMN-UHFFFAOYSA-N 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 239000000020 Nitrocellulose Substances 0.000 description 1
- 229910001370 Se alloy Inorganic materials 0.000 description 1
- 229910001215 Te alloy Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- 230000008094 contradictory effect Effects 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000000975 dye Substances 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000004093 laser heating Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229920001220 nitrocellulos Polymers 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 229960004624 perflexane Drugs 0.000 description 1
- 229920013653 perfluoroalkoxyethylene Polymers 0.000 description 1
- ZJIJAJXFLBMLCK-UHFFFAOYSA-N perfluorohexane Chemical compound FC(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)C(F)(F)F ZJIJAJXFLBMLCK-UHFFFAOYSA-N 0.000 description 1
- 238000001420 photoelectron spectroscopy Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 229920005668 polycarbonate resin Polymers 0.000 description 1
- 239000004431 polycarbonate resin Substances 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 238000000859 sublimation Methods 0.000 description 1
- 230000008022 sublimation Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Thermal Transfer Or Thermal Recording In General (AREA)
- Optical Record Carriers And Manufacture Thereof (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61142167A JPS62298944A (ja) | 1986-06-18 | 1986-06-18 | 光学的記録用媒体 |
| DE8787301046T DE3776386D1 (de) | 1986-04-24 | 1987-02-05 | Optisches aufzeichnungsmedium und verfahren zu dessen herstellung. |
| KR1019870000966A KR910009072B1 (ko) | 1986-04-24 | 1987-02-05 | 광학기록매체와 그 제조방법 |
| CA000529093A CA1258974A (en) | 1986-04-24 | 1987-02-05 | Optical recording medium and process for producing the same |
| EP87301046A EP0242942B1 (en) | 1986-04-24 | 1987-02-05 | Optical recording medium and process for producing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61142167A JPS62298944A (ja) | 1986-06-18 | 1986-06-18 | 光学的記録用媒体 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62298944A JPS62298944A (ja) | 1987-12-26 |
| JPH0447382B2 true JPH0447382B2 (enrdf_load_stackoverflow) | 1992-08-03 |
Family
ID=15308912
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61142167A Granted JPS62298944A (ja) | 1986-04-24 | 1986-06-18 | 光学的記録用媒体 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62298944A (enrdf_load_stackoverflow) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2545444B2 (ja) * | 1988-06-17 | 1996-10-16 | 共同印刷株式会社 | 磁気記録媒体及びその製造方法 |
| JP2606344B2 (ja) * | 1988-12-27 | 1997-04-30 | 凸版印刷株式会社 | 感熱記録媒体 |
| WO2009066630A1 (ja) * | 2007-11-19 | 2009-05-28 | Konica Minolta Holdings, Inc. | 撥水または防汚性物品、それを用いて構成された建築用窓ガラス、車両用窓ガラス、ディスプレイ部材、光学部品 |
-
1986
- 1986-06-18 JP JP61142167A patent/JPS62298944A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62298944A (ja) | 1987-12-26 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |