JPH044712B2 - - Google Patents
Info
- Publication number
- JPH044712B2 JPH044712B2 JP61038107A JP3810786A JPH044712B2 JP H044712 B2 JPH044712 B2 JP H044712B2 JP 61038107 A JP61038107 A JP 61038107A JP 3810786 A JP3810786 A JP 3810786A JP H044712 B2 JPH044712 B2 JP H044712B2
- Authority
- JP
- Japan
- Prior art keywords
- heat
- heating element
- resistance heating
- length
- section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010438 heat treatment Methods 0.000 claims description 36
- 238000002791 soaking Methods 0.000 claims description 15
- 238000004321 preservation Methods 0.000 claims description 2
- 238000004804 winding Methods 0.000 claims 1
- 238000009792 diffusion process Methods 0.000 description 4
- 230000020169 heat generation Effects 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Resistance Heating (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3810786A JPS62195881A (ja) | 1986-02-22 | 1986-02-22 | 環状電気炉 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3810786A JPS62195881A (ja) | 1986-02-22 | 1986-02-22 | 環状電気炉 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62195881A JPS62195881A (ja) | 1987-08-28 |
| JPH044712B2 true JPH044712B2 (hu) | 1992-01-29 |
Family
ID=12516246
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3810786A Granted JPS62195881A (ja) | 1986-02-22 | 1986-02-22 | 環状電気炉 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62195881A (hu) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4810193U (hu) * | 1971-06-16 | 1973-02-03 | ||
| JPS57117782A (en) * | 1981-01-12 | 1982-07-22 | Kokusai Electric Co Ltd | Circular electric furnace |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5267046U (hu) * | 1975-11-12 | 1977-05-18 |
-
1986
- 1986-02-22 JP JP3810786A patent/JPS62195881A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4810193U (hu) * | 1971-06-16 | 1973-02-03 | ||
| JPS57117782A (en) * | 1981-01-12 | 1982-07-22 | Kokusai Electric Co Ltd | Circular electric furnace |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62195881A (ja) | 1987-08-28 |
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