JPH0446369B2 - - Google Patents
Info
- Publication number
- JPH0446369B2 JPH0446369B2 JP10298986A JP10298986A JPH0446369B2 JP H0446369 B2 JPH0446369 B2 JP H0446369B2 JP 10298986 A JP10298986 A JP 10298986A JP 10298986 A JP10298986 A JP 10298986A JP H0446369 B2 JPH0446369 B2 JP H0446369B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- interference device
- variable interference
- reflectors
- wavelength
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010408 film Substances 0.000 claims description 25
- 239000000758 substrate Substances 0.000 claims description 22
- 229910052751 metal Inorganic materials 0.000 claims description 12
- 239000002184 metal Substances 0.000 claims description 12
- 239000011521 glass Substances 0.000 claims description 8
- 239000010409 thin film Substances 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- 229910052737 gold Inorganic materials 0.000 claims description 2
- 239000004033 plastic Substances 0.000 claims description 2
- 229920003023 plastic Polymers 0.000 claims description 2
- 239000010453 quartz Substances 0.000 claims description 2
- 229910052709 silver Inorganic materials 0.000 claims description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 1
- 239000010931 gold Substances 0.000 claims 1
- 239000004332 silver Substances 0.000 claims 1
- 125000006850 spacer group Chemical group 0.000 description 7
- 230000005540 biological transmission Effects 0.000 description 6
- 230000003287 optical effect Effects 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000013307 optical fiber Substances 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 235000012489 doughnuts Nutrition 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 229910052950 sphalerite Inorganic materials 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 229910052984 zinc sulfide Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Spectrometry And Color Measurement (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10298986A JPS62257032A (ja) | 1986-04-30 | 1986-04-30 | 可変干渉装置 |
| US06/934,843 US4859060A (en) | 1985-11-26 | 1986-11-25 | Variable interferometric device and a process for the production of the same |
| GB8628157A GB2186708B (en) | 1985-11-26 | 1986-11-25 | A variable interferometric device and a process for the production of the same |
| DE19863640340 DE3640340C2 (de) | 1985-11-26 | 1986-11-26 | Variable Interferometeranordnung |
| DE3645238A DE3645238C2 (de) | 1985-11-26 | 1986-11-26 | Optischer Sensor |
| GB8911757A GB2217839B (en) | 1985-11-26 | 1989-05-22 | An optical sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10298986A JPS62257032A (ja) | 1986-04-30 | 1986-04-30 | 可変干渉装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62257032A JPS62257032A (ja) | 1987-11-09 |
| JPH0446369B2 true JPH0446369B2 (de) | 1992-07-29 |
Family
ID=14342111
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10298986A Granted JPS62257032A (ja) | 1985-11-26 | 1986-04-30 | 可変干渉装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62257032A (de) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63241434A (ja) * | 1987-03-30 | 1988-10-06 | Sharp Corp | 可変干渉装置 |
| JPWO2016147908A1 (ja) * | 2015-03-13 | 2017-12-28 | 国立大学法人豊橋技術科学大学 | 物理・化学センサ、物理・化学センサアレイおよび物理・化学センシングデバイス |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4973120A (en) * | 1989-05-01 | 1990-11-27 | At&T Bell Laboratories | Optical isolator with resonant cavity having gyrotropic material |
| FR2768812B1 (fr) * | 1997-09-19 | 1999-10-22 | Commissariat Energie Atomique | Interferometre fabry-perot accordable integre |
| JP5316483B2 (ja) * | 2010-06-18 | 2013-10-16 | セイコーエプソン株式会社 | 光学デバイス、光学デバイスの製造方法、波長可変フィルタ、波長可変フィルタモジュール、および光スペクトラムアナライザ |
| JP5888080B2 (ja) * | 2012-04-11 | 2016-03-16 | セイコーエプソン株式会社 | 波長可変干渉フィルター、光学フィルターデバイス、光学モジュール、電子機器、及び波長可変干渉フィルターの駆動方法 |
| JP5983020B2 (ja) * | 2012-05-18 | 2016-08-31 | セイコーエプソン株式会社 | 波長可変干渉フィルター、光学フィルターデバイス、光学モジュール、及び電子機器 |
| JP6244616B2 (ja) | 2012-08-30 | 2017-12-13 | セイコーエプソン株式会社 | 波長可変干渉フィルター、光学モジュール、電子機器、および波長可変干渉フィルターの製造方法 |
| JP5987618B2 (ja) * | 2012-10-03 | 2016-09-07 | セイコーエプソン株式会社 | 波長可変干渉フィルター、光学フィルターデバイス、光学モジュール、及び電子機器 |
| JP2014182170A (ja) | 2013-03-18 | 2014-09-29 | Seiko Epson Corp | 封止構造、干渉フィルター、光学モジュール、及び電子機器 |
| FI126791B (en) | 2014-12-29 | 2017-05-31 | Teknologian Tutkimuskeskus Vtt Oy | Mirror disk for an optical interferometer, method for manufacturing a mirror disk and optical interferometer |
| FI128101B (fi) * | 2017-07-03 | 2019-09-30 | Teknologian Tutkimuskeskus Vtt Oy | Mikrosysteemi (MEMS) Fabry–Perot-interferometri, laitteisto ja menetelmä Fabry–Perot-interferometrin valmistamiseksi |
-
1986
- 1986-04-30 JP JP10298986A patent/JPS62257032A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63241434A (ja) * | 1987-03-30 | 1988-10-06 | Sharp Corp | 可変干渉装置 |
| JPWO2016147908A1 (ja) * | 2015-03-13 | 2017-12-28 | 国立大学法人豊橋技術科学大学 | 物理・化学センサ、物理・化学センサアレイおよび物理・化学センシングデバイス |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62257032A (ja) | 1987-11-09 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |