JPH0445877A - 洗浄装置 - Google Patents
洗浄装置Info
- Publication number
- JPH0445877A JPH0445877A JP15491490A JP15491490A JPH0445877A JP H0445877 A JPH0445877 A JP H0445877A JP 15491490 A JP15491490 A JP 15491490A JP 15491490 A JP15491490 A JP 15491490A JP H0445877 A JPH0445877 A JP H0445877A
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- cleaned
- cleaning
- room
- communication port
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005406 washing Methods 0.000 title claims abstract description 8
- 238000004140 cleaning Methods 0.000 claims abstract description 93
- 238000004891 communication Methods 0.000 claims abstract description 70
- 238000007789 sealing Methods 0.000 claims description 8
- 239000002904 solvent Substances 0.000 abstract description 18
- 238000009792 diffusion process Methods 0.000 abstract description 4
- 239000007788 liquid Substances 0.000 description 11
- 238000000605 extraction Methods 0.000 description 9
- 230000000694 effects Effects 0.000 description 3
- 238000013020 steam cleaning Methods 0.000 description 3
- 238000001816 cooling Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000009795 derivation Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15491490A JPH0445877A (ja) | 1990-06-13 | 1990-06-13 | 洗浄装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15491490A JPH0445877A (ja) | 1990-06-13 | 1990-06-13 | 洗浄装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0445877A true JPH0445877A (ja) | 1992-02-14 |
| JPH0571316B2 JPH0571316B2 (enrdf_load_stackoverflow) | 1993-10-06 |
Family
ID=15594721
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15491490A Granted JPH0445877A (ja) | 1990-06-13 | 1990-06-13 | 洗浄装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0445877A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017170424A (ja) * | 2016-03-18 | 2017-09-28 | 株式会社クリンビー | ワーク洗浄装置およびワーク洗浄方法 |
| JP2019042683A (ja) * | 2017-09-04 | 2019-03-22 | ジャパン・フィールド株式会社 | 被洗浄物の減圧乾燥及び洗浄移送装置 |
-
1990
- 1990-06-13 JP JP15491490A patent/JPH0445877A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0571316B2 (enrdf_load_stackoverflow) | 1993-10-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20081006 Year of fee payment: 15 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20091006 Year of fee payment: 16 |
|
| LAPS | Cancellation because of no payment of annual fees |