JPH0444612A - Production of thin film magnetic head device - Google Patents

Abstract

PURPOSE:To improve yield by dispersing danger by directly filming a lower magnetic pole onto a slider material so as to improve adhesiveness, dividing a head element into two parts, and using one part while combining it with a separate part when the other part is defective. CONSTITUTION:An A part is constituted by filming a lower magnetic pole 6, insulated layer 9, coil 5 and insulated layer 9 onto a slider material 1 in the order as mentioned above, and a B part is constituted by filming a protecting film 7, insulated layer 9 and upper magnetic pole 3 onto a holding base 8 in the order as mentioned above. Next, these A and B parts are adhered by an adhesive agent 10 like covering the B part with the A part. By detaching the holding base 8 finally, head elements arranged on the slider material can be obtained and afterwards, sliders are cut off one by one. The holding base 8 is composed of Si, SiO2, ceramic or metal and detached by dissolving or grinding. Thus, since the adhesiveness between the lower magnetic pole and the slider is made high and the head element is manufactured while being divided into the two A and B parts, the B part can be effectively utilized even when the A part is defective, and therefore, the yield is improved by lowering a defect rate as a whole.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method of manufacturing a floating type thin film magnetic head device used in thin film magnetic disk devices, magneto-optical disk devices, and the like.

[Prior Art] A magnetic disk device stores a large amount of information and plays a central role in a computer system as an external memory that can be randomly accessed. Among these magnetic disk devices, the magnetic disk device performs operations for writing and reading information. There are several types of magnetic disk devices depending on their shape, but thin-film magnetic head devices in which the head element is formed on a plane parallel to the floating surface of the slider are currently being actively developed because the manufacturing process is simple. is in progress.

This thin film magnetic head device is described, for example, in the literature (``New
Approach to making thin f
ilm head-slLderdevicesJ(I
EEE Transactions on Magne
tics, Vol.

25, No, 5. Sep, 1989))
The manufacturing method is described in detail.

FIG. 3(a) shows WII! manufactured by this conventional manufacturing method. ll! In the magnetic head device, (b) shows an enlarged view of the magnetic head portion of (a). In the figure, (1> is the slider, 2) is the magnetic head, (3> is the lower magnetic pole, (4)
hahe 1 dogi 1 fubu, (5) is coil, (6) ii lower 1
iFIs magnetic pole, <7> is maintained! It is a membrane. Protective film (7)
covers the magnetic head (2), so in reality only a part of the upper magnetic pole near Heradki Goff (4) can be seen.

FIGS. 4(a) to 4(h) show a conventional method of manufacturing a magnetic head device. The figure is a sectional view. First, in FIG. 4(a), a protective film (7>) and an upper magnetic pole (
3) is formed into a film to form a gap <4).

In FIG. 4(b), an insulating layer (9) is formed, and in FIG. 4(c), a coil 5) is formed. In FIG. 4(d), the coil (5) is covered with an insulating layer (9), in (e) a lower magnetic pole <6) is formed, and in (f) the insulating layer (9) is formed again. In (g>), the slider 1) is glued with adhesive (10), and in (h), the holding board (button) is finally removed by melting.

Usually, several dozen or more head elements (2) are formed on one wafer of slider material, so as shown in FIG.
Each piece is cut out to form a thin film magnetic head device.

The reason why the element is formed into a film on the holding substrate and the holding substrate is removed later is that the surface where the gap (4>) is exposed must ultimately be made flat.

This surface is the floating surface of the slider.

[Problems to be Solved by the Invention] Since the conventional thin film magnetic head device uses the manufacturing method described above, the slider material must be adhered to the lower magnetic pole 9) with adhesive at the end. Lower magnetic pole of time (9
) has a problem in that the surface is not flat and has large irregularities, which reduces adhesive strength and reduces yield. In addition, all processes (Fig. 4 (a) to (h)) were performed on the same wafer, so if a defect occurred in a certain process, the previous processes would be wasted. .

The present invention has been made to solve the above-mentioned problems, and an object of the present invention is to provide a method for manufacturing a thin film magnetic head device that increases the adhesion of a slider material and improves the yield.

Means for Solving the Problem] A method for manufacturing a thin film magnetic head device according to the present invention comprises a slider substrate, a lower magnetic pole, an insulating layer, and a coil (
or consisting of a slider substrate, a lower magnetic pole, and an insulating layer), a holding substrate, a protective film, an upper magnetic pole, an insulating layer, and a gap portion (or an insulating layer, a coil, a lower magnetic pole, and a protective film). The first part (consisting of a gap part and a holding board) is made separately, the first part and the second part are bonded together and integrated, and finally the holding board of the second part is removed to form a thin-film magnetic head device. .

[Function] In the manufacturing method of the present invention, since the lower magnetic pole is directly formed into a film on the slider material, the adhesion between the lower magnetic pole and the slider is increased. Also, since the head element is made into two parts, even if one part (for example, the back part) is defective,
Other parts (for example, Otsu B) can be used in combination with other parts (for example, the upper part). In other words, risk can be distributed. Therefore, the yield is improved.

[Example] Hereinafter, an example of the present invention will be described based on FIGS. 1(a) to (c>).

FIG. 1(a) shows the middle part, and FIG. 1(b) shows the second part.

The back part consists of the slider material (1), the lower magnetic pole (6), and the insulating layer (
9>, a coil (5>), and an insulating layer <9>.

The second part includes a protective film (7) and an insulating layer (7) on the holding substrate (8).
9), and the upper magnetic pole <3> are formed in this order. Next, cover the upper part and the lower part by gluing the upper part and the lower part with adhesive (10) to obtain Fig. 1 <c>. Finally, by removing the holding substrate (8>), the head elements arranged on the slider material are obtained. This state is the same as the state shown in FIG.
All that remains is to cut the sliders one by one.

In this embodiment, the holding substrate (8) is made of Si, 5i02, ceramics, or metal material, and may be removed by melting or mechanical removal, such as polishing.

A method of manufacturing a thin film magnetic head device according to another embodiment of the present invention is shown in FIGS. 2(a) to 2(c).

Figure 2(a) shows the upper part, and Figure 2(b) shows the lower part.

The upper part is formed by forming an insulating layer (9) and a lower magnetic pole (6) on the slider material (1>.
On top of this, a protective film <7>, an upper magnetic pole <3), an insulating layer (9),
A coil <5) and an insulating layer (9) are formed.

In this state, the upper part is placed over the lower part, and the upper part and the lower part are glued together to obtain Fig. 2(c). Finally, the holding board (8
) and separate the sliders one by one and you are done.

Note that the details regarding the holding substrate (8) and the adhesive are the same as in the embodiment shown in FIG.

Also, the adhesive may be an epoxy adhesive, but nothing is specified. Furthermore, a bonding method that does not use an adhesive can be considered, such as anodic bonding, but such a method may also be used.

[Effects of the Invention] As described above, according to the present invention, the back portion is composed of the slider substrate, the lower magnetic pole, the insulating layer, and the coil (or the slider substrate, the lower magnetic pole, and the insulating layer). A part consisting of a retaining substrate, a protective film, an upper magnetic pole, an insulating layer, and a gap part (or an insulating layer, a coil, an upper magnetic pole, a protective film, a gear shaft, and a retaining substrate) was made separately. After that, the above-mentioned upper part and the lower part are bonded together and integrated, and finally the holding substrate of the above-mentioned lower part is removed, so that the lower magnetic pole is directly deposited on the slider, so the adhesion between the lower magnetic pole and the slider is high. Since the product is manufactured in two parts, it has the advantage that even if one part (for example, the upper part) is defective, the other part (the lower part) will survive, reducing the overall defective rate. Yield is improved compared to conventional manufacturing methods.

[Brief explanation of drawings]

1iV(a) to (Cn) are cross-sectional views showing a method of manufacturing a thin film magnetic head device according to one embodiment of the present invention, and FIGS. 2(Q) to (c) are thin film magnetic head devices according to another embodiment of the present invention. Cross-sectional view showing the manufacturing method of the head device, FIG. 3(a)
is a perspective view showing a conventional thin-film magnetic head, FIG. 3(b) is an enlarged perspective view of its main parts, and FIGS. 4(a) to (h) are cross-sections showing a method of manufacturing a thin-film magnetic head in the conventional technology. FIG. 5 is a perspective view illustrating one step of a conventional method for manufacturing a 791M magnetic head device. In the figure, <1> is a slider, (2) is a magnetic head,
<3> is the upper magnetic pole, (4> is the gap, <5> is the coil, (6) is the lower magnetic pole, (7) is the protective film, (8) is the holding substrate, <9> is the insulating layer, (10) is an adhesive. Note that the same reference numerals in each figure indicate the same or corresponding parts.

Claims (1)

[Claims] a slider substrate with a floating surface facing parallel to the medium surface;
and a method for manufacturing a thin film magnetic head device comprising a thin film magnetic head formed on the surface of the slider substrate and comprising a lower magnetic pole, an insulating layer, a coil, an upper magnetic pole and a protective film, the slider substrate, the lower magnetic pole and the insulating layer. and a coil (or a slider substrate, a lower magnetic pole, and an insulating layer) and a holding substrate, a protective film, an upper magnetic pole, an insulating layer, and a gap portion (or an insulating layer). After making the second part (composed of the coil, upper magnetic pole, protective film, gap part, and holding board) separately, the above-mentioned first part and the second part are bonded together to integrate them, and finally, the holding board of the above-mentioned part O is removed. A method of manufacturing a thin film magnetic head device characterized by: