JPH0444595Y2 - - Google Patents
Info
- Publication number
- JPH0444595Y2 JPH0444595Y2 JP14876987U JP14876987U JPH0444595Y2 JP H0444595 Y2 JPH0444595 Y2 JP H0444595Y2 JP 14876987 U JP14876987 U JP 14876987U JP 14876987 U JP14876987 U JP 14876987U JP H0444595 Y2 JPH0444595 Y2 JP H0444595Y2
- Authority
- JP
- Japan
- Prior art keywords
- silicon oxide
- temperature
- section
- oxide film
- treatment liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007788 liquid Substances 0.000 claims description 71
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 29
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 28
- 238000004519 manufacturing process Methods 0.000 claims description 18
- 238000007654 immersion Methods 0.000 claims description 17
- 239000000758 substrate Substances 0.000 claims description 14
- 238000010438 heat treatment Methods 0.000 claims description 11
- 239000007864 aqueous solution Substances 0.000 claims description 7
- 239000002253 acid Substances 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical class [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 29
- 239000000463 material Substances 0.000 description 7
- 230000005855 radiation Effects 0.000 description 6
- 239000000243 solution Substances 0.000 description 6
- 238000007598 dipping method Methods 0.000 description 5
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 4
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 4
- 239000004327 boric acid Substances 0.000 description 4
- 238000001914 filtration Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- LRCFXGAMWKDGLA-UHFFFAOYSA-N dioxosilane;hydrate Chemical compound O.O=[Si]=O LRCFXGAMWKDGLA-UHFFFAOYSA-N 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 229910002027 silica gel Inorganic materials 0.000 description 1
- 239000000741 silica gel Substances 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
Landscapes
- Devices For Use In Laboratory Experiments (AREA)
- Silicon Compounds (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14876987U JPH0444595Y2 (enrdf_load_html_response) | 1987-09-28 | 1987-09-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14876987U JPH0444595Y2 (enrdf_load_html_response) | 1987-09-28 | 1987-09-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6453721U JPS6453721U (enrdf_load_html_response) | 1989-04-03 |
| JPH0444595Y2 true JPH0444595Y2 (enrdf_load_html_response) | 1992-10-21 |
Family
ID=31420388
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14876987U Expired JPH0444595Y2 (enrdf_load_html_response) | 1987-09-28 | 1987-09-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0444595Y2 (enrdf_load_html_response) |
-
1987
- 1987-09-28 JP JP14876987U patent/JPH0444595Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6453721U (enrdf_load_html_response) | 1989-04-03 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| FR2441807A1 (fr) | Methode de regulation du chauffage d'une enceinte et dispositif a regulation pour le chauffage d'une enceinte | |
| JPH0444595Y2 (enrdf_load_html_response) | ||
| JPH01179684A (ja) | 培養タンク | |
| Greiter et al. | Experimental investigation of heat and mass transfer in a horizontal-tube falling-film absorber with aqueous solutions | |
| JPS6231186Y2 (enrdf_load_html_response) | ||
| CN210681876U (zh) | 一种自带保温冷却功能的水性硬脂酸钙乳液存储装置 | |
| US2683080A (en) | Apparatus for growing crystals | |
| JPS6166046A (ja) | 電気温水器 | |
| JPS595806Y2 (ja) | 温水循環やぐらこたつ | |
| JP2524921B2 (ja) | 熱交換面積調節式の反応装置 | |
| JPS567995A (en) | Manufacture of heat exchanger | |
| JPS5794574A (en) | Etching vessel | |
| US2122573A (en) | Apparatus for evolving water vapor | |
| JPH0725569Y2 (ja) | 吸収冷凍機の再生器 | |
| US2347763A (en) | Temperature control system | |
| JP2602393B2 (ja) | 液卵加熱装置 | |
| JPS56160585A (en) | Heat exchanging method | |
| SU360946A1 (ru) | Способ автоматического управления процессом ректификации | |
| JPH0612361Y2 (ja) | レジスト処理装置用気液分離型熱交換器 | |
| JPS5930831Y2 (ja) | 風呂装置 | |
| JPH0449146Y2 (enrdf_load_html_response) | ||
| JPS6012285B2 (ja) | 硫化カドミウム析出膜の製造法 | |
| JPH0117221Y2 (enrdf_load_html_response) | ||
| JPS645687Y2 (enrdf_load_html_response) | ||
| JPS60155890A (ja) | 熱交換型貯湯タンク |