JPH0444358U - - Google Patents

Info

Publication number
JPH0444358U
JPH0444358U JP8437790U JP8437790U JPH0444358U JP H0444358 U JPH0444358 U JP H0444358U JP 8437790 U JP8437790 U JP 8437790U JP 8437790 U JP8437790 U JP 8437790U JP H0444358 U JPH0444358 U JP H0444358U
Authority
JP
Japan
Prior art keywords
vapor deposition
rotating shaft
ring member
deposition apparatus
axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8437790U
Other languages
English (en)
Japanese (ja)
Other versions
JP2521257Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990084377U priority Critical patent/JP2521257Y2/ja
Publication of JPH0444358U publication Critical patent/JPH0444358U/ja
Application granted granted Critical
Publication of JP2521257Y2 publication Critical patent/JP2521257Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1990084377U 1990-08-08 1990-08-08 自公転治具付蒸着装置 Expired - Lifetime JP2521257Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990084377U JP2521257Y2 (ja) 1990-08-08 1990-08-08 自公転治具付蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990084377U JP2521257Y2 (ja) 1990-08-08 1990-08-08 自公転治具付蒸着装置

Publications (2)

Publication Number Publication Date
JPH0444358U true JPH0444358U (en, 2012) 1992-04-15
JP2521257Y2 JP2521257Y2 (ja) 1996-12-25

Family

ID=31815470

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990084377U Expired - Lifetime JP2521257Y2 (ja) 1990-08-08 1990-08-08 自公転治具付蒸着装置

Country Status (1)

Country Link
JP (1) JP2521257Y2 (en, 2012)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003027233A (ja) * 2001-05-08 2003-01-29 Unaxis Balzer Ag コーティング装置用加工品支持体
CN108866316A (zh) * 2017-05-11 2018-11-23 重庆理工大学 一种齿轮表面电子束处理系统
CN111101099A (zh) * 2020-01-06 2020-05-05 宣城托新精密科技有限公司 一种汽车饰件无水雾化蒸镀方法及其蒸镀装置
CN114990493A (zh) * 2022-06-23 2022-09-02 北海惠科半导体科技有限公司 蒸发镀膜装置及其镀膜方法
CN115011930A (zh) * 2022-05-31 2022-09-06 北海惠科半导体科技有限公司 蒸发镀膜装置
CN115110038A (zh) * 2022-06-29 2022-09-27 北海惠科半导体科技有限公司 蒸发镀膜装置和镀膜方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0253965U (en, 2012) * 1988-10-06 1990-04-18

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0253965U (en, 2012) * 1988-10-06 1990-04-18

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003027233A (ja) * 2001-05-08 2003-01-29 Unaxis Balzer Ag コーティング装置用加工品支持体
CN108866316A (zh) * 2017-05-11 2018-11-23 重庆理工大学 一种齿轮表面电子束处理系统
CN111101099A (zh) * 2020-01-06 2020-05-05 宣城托新精密科技有限公司 一种汽车饰件无水雾化蒸镀方法及其蒸镀装置
CN111101099B (zh) * 2020-01-06 2024-03-29 宣城托新精密科技有限公司 一种汽车饰件无水雾化蒸镀方法及其蒸镀装置
CN115011930A (zh) * 2022-05-31 2022-09-06 北海惠科半导体科技有限公司 蒸发镀膜装置
CN114990493A (zh) * 2022-06-23 2022-09-02 北海惠科半导体科技有限公司 蒸发镀膜装置及其镀膜方法
CN114990493B (zh) * 2022-06-23 2024-01-12 北海惠科半导体科技有限公司 蒸发镀膜装置及其镀膜方法
CN115110038A (zh) * 2022-06-29 2022-09-27 北海惠科半导体科技有限公司 蒸发镀膜装置和镀膜方法
CN115110038B (zh) * 2022-06-29 2024-01-12 北海惠科半导体科技有限公司 蒸发镀膜装置和镀膜方法

Also Published As

Publication number Publication date
JP2521257Y2 (ja) 1996-12-25

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