JPH0444218Y2 - - Google Patents
Info
- Publication number
- JPH0444218Y2 JPH0444218Y2 JP14221086U JP14221086U JPH0444218Y2 JP H0444218 Y2 JPH0444218 Y2 JP H0444218Y2 JP 14221086 U JP14221086 U JP 14221086U JP 14221086 U JP14221086 U JP 14221086U JP H0444218 Y2 JPH0444218 Y2 JP H0444218Y2
- Authority
- JP
- Japan
- Prior art keywords
- valve
- nozzle
- tank
- chemical liquid
- filter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000126 substance Substances 0.000 claims description 71
- 239000007788 liquid Substances 0.000 claims description 38
- 239000000243 solution Substances 0.000 description 37
- 239000004065 semiconductor Substances 0.000 description 9
- 239000003814 drug Substances 0.000 description 6
- 238000011144 upstream manufacturing Methods 0.000 description 6
- 229940079593 drug Drugs 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000007796 conventional method Methods 0.000 description 3
- 239000000428 dust Substances 0.000 description 3
- 238000005086 pumping Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000008155 medical solution Substances 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14221086U JPH0444218Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-09-16 | 1986-09-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14221086U JPH0444218Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-09-16 | 1986-09-16 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6346974U JPS6346974U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-03-30 |
| JPH0444218Y2 true JPH0444218Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1992-10-19 |
Family
ID=31050719
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14221086U Expired JPH0444218Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-09-16 | 1986-09-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0444218Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0725590Y2 (ja) * | 1989-05-25 | 1995-06-07 | 中野冷機株式会社 | 冷凍・冷蔵ショーケース |
-
1986
- 1986-09-16 JP JP14221086U patent/JPH0444218Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6346974U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-03-30 |